Mr. Yoji Inui Profile

Yoji Inui

Manager at Tokuyama Corp

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Author

Publications (7)

Proceedings Article | 31 December 2009 Paper

Development of large size MgF2 single crystal grown by the CZ method

Masao Ariyuki, Yasuhiro Hashimoto, Naoto Mochizuki, Yoji Inui, Isao Masada, Teruhiko Nawata, Tsuguo Fukuda

Proceedings Volume 7504, 75041Q (2009) https://doi.org/10.1117/12.836349

KEYWORDS: Crystals, Magnesium fluoride, Transmittance, Vacuum ultraviolet, Laser crystals, Polarizers, Transparency, Crystal optics, Laser irradiation, Single crystal X-ray diffraction

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Proceedings Article | 7 March 2008 Paper

Fluoride single crystals for the next generation lithography

Teruhiko Nawata, Yoji Inui, Toshiro Mabuchi, Naoto Mochizuki, Isao Masada, Eiichi Nishijima, Hiroki Sato, Tsuguo Fukuda

Proceedings Volume 6924, 69242L (2008) https://doi.org/10.1117/12.771786

KEYWORDS: Crystals, Transmittance, Magnesium fluoride, Refractive index, Vacuum ultraviolet, Laser crystals, Lithography, Immersion lithography, Transparency, Crystallography

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Proceedings Article | 27 March 2007 Paper

High-index fluoride materials for 193-nm immersion lithography

Teruhiko Nawata, Yoji Inui, Isao Masada, Eiichi Nishijima, Toshiro Mabuchi, Naoto Mochizuki, Hiroki Satoh, Tsuguo Fukuda

Proceedings Volume 6520, 65201P (2007) https://doi.org/10.1117/12.711045

KEYWORDS: Crystals, Transmittance, Laser induced fluorescence, Annealing, Refractive index, Immersion lithography, Transparency, Vacuum ultraviolet, Scattering, Excimer lasers

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Proceedings Article | 15 March 2006 Paper

High index fluoride materials for 193 nm immersion lithography

T. Nawata, Y. Inui, I. Masada, E. Nishijima, H. Satoh, T. Fukuda

Proceedings Volume 6154, 61541A (2006) https://doi.org/10.1117/12.657247

KEYWORDS: Crystals, Refractive index, Fluorine, Vacuum ultraviolet, Immersion lithography, Metals, Laser induced fluorescence, Transmittance, Birefringence, Transparency

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Proceedings Article | 15 March 2006 Paper

Structure and optical property of large-size CaF₂ single crystals grown by the CZ method

I. Masada, T. Nawata, Y. Inui, T. Date, T. Mabuchi, E. Nishijima, T. Fukuda

Proceedings Volume 6154, 61542P (2006) https://doi.org/10.1117/12.657249

KEYWORDS: Crystals, X-rays, Single crystal X-ray diffraction, Diffraction, Optical properties, Refractive index, Laser crystals, Deep ultraviolet, X-ray diffraction, Reflection

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Proceedings Article | 12 May 2005 Paper

Properties of ultra-large CaF2 crystals for the high NA optics

Y. Hatanaka, H. Yanagi, T. Nawata, Y. Inui, T. Mabuchi, K. Yasumura, E. Nishijima, T. Fukuda

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600318

KEYWORDS: Crystals, Deep ultraviolet, Annealing, Laser crystals, Birefringence, Lithography, Interfaces, Transparency, Convection, Computer simulations

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Proceedings Article | 28 May 2004 Paper

Properties of large CaF2 crystals grown by CZ method for lens materials

Hiroyuki Yanagi, T. Nawata, Yoji Inui, Y. Hatanaka, E. Nishijima, Tsuguo Fukuda

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.556614

KEYWORDS: Crystals, Annealing, Birefringence, Lithography, Fluorine, Vacuum ultraviolet, Light sources, Photography, Transparency, Diffraction

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Showing 5 of 7 publications

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