Dr. Yuichi Nishimae Profile

Dr. Yuichi Nishimae

at Ciba Specialty Chemicals KK

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Author

Publications (2)

Proceedings Article | 3 April 2008 Paper

Non-ionic photoacid generators for chemically amplified resists: chromophore effect on resist performance

Yuichi Nishimae, Hitoshi Yamato, Toshikage Asakura, Masaki Ohwa

Proceedings Volume 6923, 69233Q (2008) https://doi.org/10.1117/12.770883

KEYWORDS: Fluorine, Coating, Lithography, Chromophores, Polymers, Photoresist materials, Transparency, Chemically amplified resists, Carbon, Water

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Proceedings Article | 2 April 2007 Paper

Non-ionic photoacid generators for chemically amplified resists: evaluation results on the application-relevant properties

Toshikage Asakura, Hitoshi Yamato, Yuichi Nishimae, Masaki Ohwa

Proceedings Volume 6519, 65192L (2007) https://doi.org/10.1117/12.708399

KEYWORDS: Polymers, Lithography, Line edge roughness, Photoresist materials, Coating, Scanning electron microscopy, Immersion lithography, Chemically amplified resists, Optical lithography, Absorption

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