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Yusuke Shoji
at Dai Nippon Printing Co Ltd
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Publications (1)
Proceedings Article | 12 November 2024 Presentation + Paper
Evaluating high-throughput mask systems for mainstream technology applications
Martin Glimtoft, Robert Eklund, Mikael Wahlsten, Mats Rosling, Anders Svensson, Youngjin Park, Yukihiro Fujimura, Izumi Hotei, Mei Ebisawa, Yusuke Shoji, Shingo Yoshikawa
Proceedings Volume 13216, 132160L (2024) https://doi.org/10.1117/12.3034858
KEYWORDS: Photomasks, Deep ultraviolet, Printing, Design, Laser applications, Semiconductors, Industry, Semiconductor lasers, Semiconducting wafers, Scanning electron microscopy
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