A single photonic crystal nanobeam cavity (PCNC) supporting both high-order air and dielectric modes was firstly proposed for on-chip dual-parameter sensing. Due to the different field distributions of the two modes, they have quite different response to ambient refractive index and temperature variations. The geometrical parameters of the PCNC were optimized to achieve a suitable bandgap as well as make the wavelength locate at the commonly used wavelength band. The proposed PCNC shows a refractive index sensitivity of 172.5 nm/RIU (refractive index unit) and a temperature sensitivity of 47.4 pm/K for the air mode, while a refractive index sensitivity of 145.5 nm/RIU and a temperature sensitivity of 54.1 pm/K for the dielectric mode. The footprint of the sensing unit is only 0.8×7.6 μm2 .
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