Dr. Hanae Zegmout Profile

Dr. Hanae Zegmout

at CEA

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Publications (1)

Proceedings Article | 26 February 2020 Presentation + Paper

High speed integrated waveguide lateral Si/Ge/Si photodiodes with optimized transit time

H. Zegmout, B. Szelag, S. Bernabé, L. Virot, P. Grosse, Q. Wilmart, S. Brision

Proceedings Volume 11285, 1128515 (2020) https://doi.org/10.1117/12.2545723

KEYWORDS: Photodiodes, Germanium, Chemical mechanical planarization, Waveguides, Silicon, Signal to noise ratio, Modulators, Semiconducting wafers, Logic

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