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Kexin Wu
at Changchun Univ. of Science and Technology
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Publications (1)
Proceedings Article | 4 March 2015 Paper
Research on silicon microchannel arrays oxide insulation technology
Ke-xin Wu, Qingduo Duanmu, Guozheng Wang, Ji-kai Yang, Yang-qiang Kou
Proceedings Volume 9521, 95210Z (2015) https://doi.org/10.1117/12.2175992
KEYWORDS: Silicon, Silica, Oxygen, Oxides, Microchannel plates, Thermal oxidation, Silicon photomultipliers, Crystals, Electrochemical etching, Oxidation
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