Dr. Xiaolong Jiang Profile

Dr. Xiaolong Jiang

at China Academy of Engineering Physics

SPIE Involvement:

Author

Publications (5)

SPIE Journal Paper | 20 October 2015

Design and fabrication of sine-top broadband gold-coated gratings

Bilali Muhutijiang, Keqiang Qiu, Xiaolong Jiang, Shaojun Fu

OE, Vol. 54, Issue 10, 105109, (October 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.10.105109

KEYWORDS: Diffraction, Diffraction gratings, Photoresist materials, Gold, Optical design, Etching, Quartz, Photomasks, Photoresist developing, Ion beams

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Proceedings Article | 17 April 2015 Paper

Fabrication of sine-top broadband gold-coated gratings

Bilali Muhutijiang, Keqiang Qiu, Yanchang Zheng, Xiaolong Jiang, Yilin Hong

Proceedings Volume 9374, 937418 (2015) https://doi.org/10.1117/12.2075013

KEYWORDS: Diffraction gratings, Diffraction, Photoresist materials, Photoresist developing, Silica, Etching, Laser damage threshold, Photomasks, Gold, Ion beams

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Proceedings Article | 13 March 2015 Paper

Finely control groove-depth variations of large-area diffraction gratings

Lixiang Wu, Keqiang Qiu, Xiaolong Jiang, Yanchang Zheng, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 9374, 937411 (2015) https://doi.org/10.1117/12.2077396

KEYWORDS: Etching, Ion beams, Raster graphics, Ions, Diffraction gratings, Optical components, Algorithm development, Vacuum ultraviolet, Synchrotron radiation, Synchrotron technology

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Proceedings Article | 28 August 2014 Paper

Fabrication of high aspect ratio silicon gratings by interference lithography and potassium hydroxide anisotropic etch technique

Yanchang Zheng, Keqiang Qiu, Xiaolong Jiang, Qingbo Wang, Lixiang Wu, Lali Bi, Yilin Hong

Proceedings Volume 9170, 917018 (2014) https://doi.org/10.1117/12.2058669

KEYWORDS: Etching, Silicon, Anisotropic etching, Lithography, Fabrication, Semiconducting wafers, Potassium, Photoresist materials, Aluminum, Optical alignment

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Proceedings Article | 9 July 2013 Paper

Improve the laser damage resistance of fused silica by wet surface cleaning and optimized HF etch process

Xiaolong Jiang, Ying Liu, Huanle Rao, Shaojun Fu

Proceedings Volume 8786, 87860Q (2013) https://doi.org/10.1117/12.2020734

KEYWORDS: Etching, Silica, Laser induced damage, HF etching, Contamination, Metals, Polishing, Resistance, Cerium, Surface finishing

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