Mr. Yasuhiro Hidaka Profile

Yasuhiro Hidaka

Principal engineer at KLA Corporation

SPIE Involvement:

Author

Area of Expertise:

Optical metrology , Level sensor in lithography scanner , Overlay measurement , Spectroscopic ellipsometry , Interferometric range detection , Image processing

Publications (2)

Proceedings Article | 26 May 2022 Presentation + Paper

Sensitivity and repeatability performance on overlay and CD measurement by incorporating hologram based ellipsometry

Yasuhiro Hidaka, Jinyong Kim, Jaehwang Jung, Mitsunori Numata, Wookrae Kim, Shinji Ueyama, Myungjun Lee

Proceedings Volume 12053, 1205311 (2022) https://doi.org/10.1117/12.2614734

KEYWORDS: Ellipsometry, Holograms, Metrology, Polarization, Reflectivity, Image sensors, Objectives, Critical dimension metrology, Semiconducting wafers, Overlay metrology

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Proceedings Article | 15 March 2021 Presentation + Paper

A breakthrough on throughput and accuracy limitation in ellipsometry using self-interference holographic analysis

Jaehwang Jung, Yasuhiro Hidaka, Jinseob Kim, Mitsunori Numata, Wookrae Kim, Shinji Ueyama, Myungjun Lee

Proceedings Volume 11611, 116111J (2021) https://doi.org/10.1117/12.2581555

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