The need for LWR metrology standardization: the imec roughness protocol

Gian Francesco Lorusso; Takumichi Sutani; Vito Rutigliani; Frieda van Roey; Alain Moussa; Anne-Laure Charley; Chris Mack; Patrick Naulleau; Vassilios Constantoudis; Masami Ikota; Toru Ishimoto; Shunsuke Koshihara

doi:10.1117/12.2294617

28 March 2018 The need for LWR metrology standardization: the imec roughness protocol

Gian Francesco Lorusso, Takumichi Sutani , Vito Rutigliani, Frieda van Roey, Alain Moussa, Anne-Laure Charley, Chris Mack, Patrick Naulleau, Vassilios Constantoudis , Masami Ikota , Toru Ishimoto, Shunsuke Koshihara

Author Affiliations +

Proceedings Volume 10585, Metrology, Inspection, and Process Control for Microlithography XXXII; 105850D (2018) https://doi.org/10.1117/12.2294617
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

As semiconductor technology keeps moving forward, undeterred by the many challenges ahead, one specific deliverable is capturing the attention of many experts in the field: Line Width Roughness (LWR) specifications are expected to be less than 2nm in the near term, and to drop below 1nm in just a few years. This is a daunting challenge and engineers throughout the industry are trying to meet these targets using every means at their disposal. However, although current efforts are surely admirable, we believe they are not enough. The fact is that a specification has a meaning only if there is an agreed methodology to verify if the criterion is met or not. Such a standardization is critical in any field of science and technology and the question that we need to ask ourselves today is whether we have a standardized LWR metrology or not. In other words, if a single reference sample were provided, would everyone measuring it get reasonably comparable results? We came to realize that this is not the case and that the observed spread in the results throughout the industry is quite large. In our opinion, this makes the comparison of LWR data among institutions, or to a specification, very difficult. In this paper, we report the spread of measured LWR data across the semiconductor industry. We investigate the impact of image acquisition, measurement algorithm, and frequency analysis parameters on LWR metrology. We review critically some of the International Technology Roadmap for Semiconductors (ITRS) metrology guidelines (such as measurement box length larger than 2μm and the need to correct for SEM noise). We compare the SEM roughness results to AFM measurements. Finally, we propose a standardized LWR measurement protocol - the imec Roughness Protocol (iRP) - intended to ensure that every time LWR measurements are compared (from various sources or to specifications), the comparison is sensible and sound. We deeply believe that the industry is at a point where it is imperative to guarantee that when talking about a critical parameter such like LWR, everyone speaks the same language, which is not currently the case.

Conference Presentation

Citation Download Citation

Gian Francesco Lorusso, Takumichi Sutani , Vito Rutigliani, Frieda van Roey, Alain Moussa, Anne-Laure Charley, Chris Mack, Patrick Naulleau, Vassilios Constantoudis , Masami Ikota , Toru Ishimoto, and Shunsuke Koshihara "The need for LWR metrology standardization: the imec roughness protocol", Proc. SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 105850D (28 March 2018); https://doi.org/10.1117/12.2294617

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