Mr. Akihiro Takano Profile

Akihiro Takano

at Nagaoka Univ of Technology

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Publications (2)

Proceedings Article | 14 December 2009 Paper

PH control of water flowing in micro structure by local electrical field method

Akihiro Takano, Akira Kawai

Proceedings Volume 7520, 752033 (2009) https://doi.org/10.1117/12.841129

KEYWORDS: Electrodes, Control systems, Oxygen, Aluminum, Photoresist materials, Glasses, Photomasks, Photography, Lithography, Gold

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Proceedings Article | 14 December 2009 Paper

Durability of self-standing resist sheet composed with micro holes

Akihiro Takano, Akira Kawai

Proceedings Volume 7520, 752032 (2009) https://doi.org/10.1117/12.841091

KEYWORDS: Microelectromechanical systems, Finite element methods, Optical lithography, Photoresist materials, 3D modeling, Polymers, Photomasks, Photography, Epoxies, Stress analysis

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