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Alexander Brady
at Bruker Nano Inc
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Publications (2)
SPIE Journal Paper | 22 March 2023 Open Access
Inline metrology of high aspect ratio hole tilt and center line shift using small-angle x-ray scattering
JM3, Vol. 22, Issue 03, 031205, (March 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031205
KEYWORDS: Semiconducting wafers, X-rays, Metrology, Scattering, Etching, 3D modeling, Model-based design, Laser scattering, Critical dimension metrology, Nondestructive evaluation
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Proceedings Article | 26 May 2022 Presentation + Paper
Inline metrology of high aspect ratio hole tilt using small-angle x-ray scattering
Peter Gin, Matthew Wormington, Alexander Brady, Kevin Matney, Jin Zhang, Osman Sorkhabi
Proceedings Volume 12053, 1205312 (2022) https://doi.org/10.1117/12.2614312
KEYWORDS: Semiconducting wafers, X-rays, Etching, Metrology, Scattering, Calibration, Sensors, Photomasks, Electrons, Nondestructive evaluation
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