Dr. Boyce Chang
at Lawrence Berkeley National Lab
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 13 June 2022 Presentation
Boyce Chang, Priscilla Pieters, Whitney Loo, Scott Dhuey, Eric Dailing, Yi Liu, Paul Nealey, A. Paul Alivisatos, Ricardo Ruiz
Proceedings Volume PC12054, PC120540F (2022) https://doi.org/10.1117/12.2614291
KEYWORDS: Directed self assembly, Polymers, Nanocrystals, Superlattices, Polymer thin films, Photomasks, Nanofabrication, Molecules, Molecular self-assembly, Lithography

Proceedings Article | 13 June 2022 Presentation
Whitney Loo, Boyce Chang, Beihang Yu, Scott Dhuey, Ricardo Ruiz, Paul Nealey
Proceedings Volume PC12054, PC1205403 (2022) https://doi.org/10.1117/12.2614072
KEYWORDS: Directed self assembly, Atomic layer deposition, Silicon, Quantitative analysis, Polymethylmethacrylate, Polymers, Photomicroscopy, Optical lithography, Nanostructures, Nanolithography

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