Chenchen Zhang
at Institute of Microelectronics of the CAS
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper
Enxu Liu, Chaoran Yang, Junjie Li, Na Zhou, Longrui Xia, Rui Chen, Hua Shao, Jianfeng Gao, Zhenzhen Kong, Chenchen Zhang, Panpan Lai, Tao Yang, Yayi Wei, Junfeng Li, Jun Luo, Wenwu Wang
Proceedings Volume 12958, 129580F (2024) https://doi.org/10.1117/12.3010332
KEYWORDS: Etching, Plasma, Silicon, Dry etching, Field effect transistors, Gallium arsenide, Transistors, Particles, Resistance, Reflection

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