Dr. Na Zhou Profile

Dr. Na Zhou

at Institute of Microelectronics of the CAS

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Author

Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Study of selective dry etching Si0.7Ge0.3 with different plasma source in process of gate-all-around FET

Enxu Liu, Chaoran Yang, Junjie Li, Na Zhou, Longrui Xia, Rui Chen, Hua Shao, Jianfeng Gao, Zhenzhen Kong, Chenchen Zhang, Panpan Lai, Tao Yang, Yayi Wei, Junfeng Li, Jun Luo, Wenwu Wang

Proceedings Volume 12958, 129580F (2024) https://doi.org/10.1117/12.3010332

KEYWORDS: Etching, Plasma, Silicon, Dry etching, Field effect transistors, Gallium arsenide, Transistors, Particles, Resistance, Reflection

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SPIE Journal Paper | 10 May 2019

Deep silicon etching for thermopile structures using a modified Bosch process

Na Zhou, Junjie Li, Henry Radamson, Lin Li, Qifeng Jiang, Junfeng Li

JM3, Vol. 18, Issue 02, 024501, (May 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.2.024501

KEYWORDS: Etching, Silicon, Polymers, Ions, Lithium, Semiconducting wafers, Photomasks, Image processing, Scanning electron microscopy, Deep reactive ion etching

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