Mr. Chi Seng Ng Profile

Chi Seng Ng

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Publications (7)

Proceedings Article | 23 September 2011 Paper

Whole field curvature and residual stress determination of silicon wafers by reflectometry

Chi Seng Ng, Anand Asundi

Proceedings Volume 8105, 81050N (2011) https://doi.org/10.1117/12.894396

KEYWORDS: Semiconducting wafers, Calibration, Reflectometry, Silicon, Mirrors, Phase shifts, Reflection, Titanium, Monochromatic aberrations, Computing systems

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Proceedings Article | 20 September 2011 Paper

Rapid defect detections of bonded wafer using near infrared polariscope

Chi Seng Ng, Anand Asundi

Proceedings Volume 8105, 81050P (2011) https://doi.org/10.1117/12.894402

KEYWORDS: Semiconducting wafers, Particles, Interfaces, Silicon, Wafer bonding, Inspection, Infrared imaging, Defect detection, Infrared radiation, Near infrared

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Proceedings Article | 2 September 2010 Paper

Stress measurement of thin wafer using reflection grating method

Chi Seng Ng, Anand Asundi

Proceedings Volume 7792, 779210 (2010) https://doi.org/10.1117/12.861058

KEYWORDS: Semiconducting wafers, Reflection, Silicon, Manufacturing, Calibration, Phase shifts, LCDs, Microelectromechanical systems, Photovoltaics, Silicon films

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Proceedings Article | 15 April 2010 Paper

Defect inspections using infrared phase shift field polariscope

Chi Seng Ng, Anand Krishna Asundi

Proceedings Volume 7522, 75220A (2010) https://doi.org/10.1117/12.851597

KEYWORDS: Semiconducting wafers, Infrared radiation, Particles, Silicon, Infrared imaging, Phase shifts, Photoelasticity, Defect inspection, Inspection, Interfaces

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Proceedings Article | 15 April 2010 Paper

Curvature measurement system of Si-wafer using circular gratings

Chi Seng Ng, Anand Krishna Asundi

Proceedings Volume 7522, 75220K (2010) https://doi.org/10.1117/12.851832

KEYWORDS: Semiconducting wafers, Phase shifts, Reflection, Image processing, Time metrology, LCDs, Phase shifting, Photovoltaics, Computing systems, Digital image processing

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Proceedings Article | 3 October 2008 Paper

Whole field residual stress measurement using computer aided reflection grating

Chi Seng Ng, Yoke Chin Goh, Anand Asundi

Proceedings Volume 7155, 71552C (2008) https://doi.org/10.1117/12.814586

KEYWORDS: Semiconducting wafers, Reflection, Wafer-level optics, LCDs, Modulation, Beam splitters, Image analysis, Image processing, Image quality, Optics manufacturing

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Proceedings Article | 11 September 2007 Paper

Warpage of thin wafers using computer aided reflection moire method

Chi Seng Ng, Kok Yau Chua, Meng Tong Ong, Yoke Chin Goh, Anand Asundi

Proceedings Volume 6672, 667203 (2007) https://doi.org/10.1117/12.732783

KEYWORDS: Semiconducting wafers, Metals, LCDs, Packaging, Silicon, Beam splitters, Visualization, Reflection, Moire patterns, Analytical research

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Showing 5 of 7 publications

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