Dave Oak
at KLA Corporation
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper
Ying Gao, Tian Lan, Osman Sorkhabi, Jin Zhang, Yung-Yi Lin, Maggie Li, Tien-Jung Lee, Dave Oak, Christopher Liman, Boxue Chen, Zhengquan Tan
Proceedings Volume 12955, 129553A (2024) https://doi.org/10.1117/12.3010944
KEYWORDS: Etching, Scattering, X-rays, Structural monitoring, 3D modeling, Visualization, Contour extraction, 3D metrology, Satellites, Modeling

Proceedings Article | 10 April 2024 Poster + Paper
Jin Zhang, Tian Lan, Ying Gao, Osman Sorkhabi, Yung-Yi Lin, Maggie Li, Dave Oak, Zhengquan Tan
Proceedings Volume 12955, 1295539 (2024) https://doi.org/10.1117/12.3010927
KEYWORDS: Etching, Critical dimension metrology, Semiconducting wafers, Scattering, Cadmium, X-rays, Metrology, 3D metrology, Nondestructive evaluation, Distortion

SPIE Journal Paper | 6 April 2023
Osman Sorkhabi, Jin Zhang, Dawei Hu, Adili Aiyiti, Yung-Yi Lin, Maggie Li, Ha Quoc Thang Bui, Dave Oak, Peimei Da, Zhengquan Tan
JM3, Vol. 22, Issue 03, 031207, (April 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031207
KEYWORDS: Semiconducting wafers, Etching, X-ray optics, X-rays, Scatterometry, Single crystal X-ray diffraction, Cadmium sulfide, Scanning electron microscopy, Education and training, Optical sensing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top