Hien T. Vu
Software Engineer at Siemens EDA
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 16 September 2022 Paper
Proceedings Volume 12325, 1232507 (2022) https://doi.org/10.1117/12.2641214
KEYWORDS: Optical proximity correction, Photomasks, Electronic design automation, Resolution enhancement technologies, SRAF, Data storage, Semiconducting wafers, Scattering

Proceedings Article | 20 March 2018 Presentation + Paper
Proceedings Volume 10587, 105870R (2018) https://doi.org/10.1117/12.2297240
KEYWORDS: Optical proximity correction, Photomasks, Data processing, Resolution enhancement technologies, SRAF, Computing systems, Parallel processing, Integrated circuits, Design for manufacturability

Proceedings Article | 13 July 2017 Paper
Jian-Cheng Chen, Min-Ying Lu, Xiang Fang, Ming-Feng Shen, Shou-Yuan Ma, Chuen-Huei Yang, Joe Tsai, Rachel Lee, Erwin Deng, Ling-Chieh Lin, Hung-Yueh Liao, Jenny Tsai, Amanda Bowhill, Hien Vu, Gordon Russell
Proceedings Volume 10454, 104540G (2017) https://doi.org/10.1117/12.2278691
KEYWORDS: Reticles, Databases

Proceedings Article | 10 May 2016 Paper
Shou-Yuan Ma, Chuen-Huei Yang, Joe Tsai, Alice Wang, Roger Lin, Rachel Lee, Erwin Deng, Ling-Chieh Lin, Hung-Yueh Liao, Jenny Tsai, Amanda Bowhill, Hien Vu, Gordon Russell
Proceedings Volume 9984, 99840D (2016) https://doi.org/10.1117/12.2240292
KEYWORDS: Photomasks, Semiconducting wafers, Reticles, Data conversion, Acquisition tracking and pointing, Neodymium, Radon, Databases, Visualization, Etching

Proceedings Article | 23 March 2009 Paper
Proceedings Volume 7272, 727216 (2009) https://doi.org/10.1117/12.814236
KEYWORDS: Data centers, Optical proximity correction, Control systems, Resolution enhancement technologies, Solids, Visualization, Optical components, Optical resolution, Optical calibration, Computing systems

Showing 5 of 6 publications
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