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Hsin Cheng Lee
at National Synchrotron Radiation Research Ctr
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Publications (1)
Proceedings Article | 7 June 2002 Paper
In-situ x-ray reflectivity measurement of the interface roughness of tantalum pentoxide thin film during rf magnetron sputtering deposition
Chih-Hao Lee, Tzu-Wen Huang, Hsin-Yi Lee, Yung-Wei Hsieh
Proceedings Volume 4703, (2002) https://doi.org/10.1117/12.469629
KEYWORDS: Thin films, X-rays, Reflectivity, Interfaces, Crystals, Surface roughness, Sputter deposition, Silicon, Tantalum, Scattering
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