Unspecified Jeff Hsia Profile

Jeff Hsia

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Publications (2)

Proceedings Article | 10 April 2024 Poster

E-beam metrology and defect inspection study of thin photoresist using ASML’s eP5

Mahmudul Hasan, Willem van Mierlo, Jeff Hsia, Natalia Davydova, Andreas Frommhold, Christophe Beral, Anne-Laure Charley, Matteo Beggiato

Proceedings Volume 12955, 129552S (2024) https://doi.org/10.1117/12.3010445

KEYWORDS: Metrology, Scanning electron microscopy, Photoresist materials, Defect inspection, Image quality, Electron beam lithography, Defect detection, Yield improvement, Signal to noise ratio, Semiconducting wafers

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Proceedings Article | 10 April 2024 Presentation + Paper

Feature grouping to enable edge placement error-aware process control in multi-feature logic use case

Guillaume Schelcher, Marsil Athayde, Stijn Schoofs, Jeff Hsia, Zuan Khalik, Fahong Li, Konstantin Nechaev, Reza Sahraeian, Amir-Hossein Tamaddon, Victor Blanco, Stefan van der Sanden, Yichen Zhang, Roy Anunciado, Harm Dillen, Philippe Leray

Proceedings Volume 12955, 129550O (2024) https://doi.org/10.1117/12.3010421

KEYWORDS: Semiconducting wafers, Overlay metrology, Cross validation, Process control, Logic, Metrology, Simulations, Scanning electron microscopy, Lithography

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