Dr. Joon-Yeon Cho Profile

Dr. Joon-Yeon Cho

at Merck Advanced Technologies Ltd

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Author

Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Spin-on metal-oxide underlayer for EUV patterning

Zhong Li, Viktor Kampitakis, Youngjun Her, Charito Antonio, Takanori Kudo, Salem Mullen, Elayaraja Muthuswamy, Orest Polishchuk, Adam Ware, Elizabeth Wolfer, Dong Yang, Joon-Yeon Cho, Aritaka Hishida, Takashi Sekito

Proceedings Volume 12957, 1295713 (2024) https://doi.org/10.1117/12.3009979

KEYWORDS: Plasma etching, Extreme ultraviolet lithography, Metal oxides, Photoresist materials, Advanced patterning

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Proceedings Article | 9 April 2024 Presentation + Paper

Development of wafer edge protection layer for advanced patterning process

Takanori Kudo, JoonYeon Cho, Aritaka Hishida, Salem Mullen, Elizabeth Wolfer, Orest Polishchuk, Charito Antonio, Zhong Li

Proceedings Volume 12957, 129570Y (2024) https://doi.org/10.1117/12.3010497

KEYWORDS: Semiconducting wafers, Metals, Coating, Contamination, Polymers, Materials properties, Industry, Solubility, Semiconductors, Advanced patterning

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