Mitigation of laser-induced surface damage sites on fused silica components is critical for reliable and cost-effective operation of Inertial Confinement Fusion lasers such as the National Ignition Facility in the USA or the Laser MégaJoule in France, or the Shen Guang in China. CO2 laser processing has proven to be an effective technique for laser-damage mitigation on large aperture silica optics. Here, we present a quantitative and comparative study of mitigated damaged sites ablated with different laser spot sizes ( 400 µm to 100 µm) and with parametric variations on pulse repetition rate and pulse fluence. We focus on the laser processing parameters required to reduce negative effects such as surface deformation, residual stress, debris formation, or rim formation, and compare their performance regarding optical damage initiation. Numerical simulations based on commercial software COMSOL-Multi-physics are used to have a better insight of the thermo-mechanical dynamics occurring during the laser processing of fused silica, and as guidance to improve the mitigation process.
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