Prof. Martin Hoffmann Profile

Prof. Martin Hoffmann

Chair of Microsystems Techn at Ruhr-Univ Bochum

SPIE Involvement:

Author

SPIE Journal Paper | 22 December 2021 Open Access

Perspectives of reactive ion etching of silicate glasses for optical microsystems

Christoph Weigel, Ulrike Brokmann, Meike Hofmann, Arne Behrens, Edda Rädlein, Martin Hoffmann, Steffen Strehle, Stefan Sinzinger

JOM, Vol. 1, Issue 04, 040901, (December 2021) https://doi.org/10.1117/12.10.1117/1.JOM.1.4.040901

KEYWORDS: Etching, Glasses, Reactive ion etching, Optical microsystems, Plasma, Ions, Silicate glass, Silicon, Crystals, Fluorine

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Proceedings Article | 2 March 2020 Presentation + Paper

Advanced broadband MEMS infrared emitter based on high-temperature-resistant nanostructured surfaces and packaging solutions for harsh environments

S. Biermann, A. Magi, P. Sachse, M. Hoffmann, K. Wedrich, L. Müller, R. Koppert, T. Ortlepp, J. Baldauf

Proceedings Volume 11279, 1127908 (2020) https://doi.org/10.1117/12.2545119

KEYWORDS: Silicon, Infrared radiation, Microelectromechanical systems, Platinum, Gases, Packaging, Temperature metrology, Gas sensors, Resistance, Modulation, Black bodies, Photometry, Infrared detection, Infrared spectroscopy, Infrared technology

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Proceedings Article | 26 March 2019 Paper

Integrated soft UV-nanoimprint lithography in a nanopositioning and nanomeasuring machine for accurate positioning of stamp to substrate

Shraddha Supreeti, Johannes Kirchner, Martin Hofmann, Rostyslav Mastylo, Ivo Rangelow, Eberhard Manske, Martin Hoffmann, Stefan Sinzinger

Proceedings Volume 10958, 1095819 (2019) https://doi.org/10.1117/12.2514832

KEYWORDS: Sensors, Ultraviolet radiation, Nanoimprint lithography, Silicon, Nanostructures, Lithography, Photoresist processing, Scanning electron microscopy, Fabrication, Optical sensors

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Proceedings Article | 1 June 2015 Paper

Passive microsensor for binary counting of numerous threshold events

Hannes Mehner, Silvan Schwebke, Steffen Leopold, Martin Hoffmann

Proceedings Volume 9517, 95170Z (2015) https://doi.org/10.1117/12.2178726

KEYWORDS: Binary data, Microsystems, Switching, Sensors, Actuators, Microsensors, Silicon, Resistance, Transducers, Video

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Proceedings Article | 21 May 2015 Paper

2D stepping microdrive for hyperspectral imaging

Csaba Endrödy, Hannes Mehner, Adrian Grewe, Stefan Sinzinger, Martin Hoffmann

Proceedings Volume 9517, 95170K (2015) https://doi.org/10.1117/12.2178867

KEYWORDS: Actuators, Electrodes, Hyperspectral imaging, Deep reactive ion etching, Microsystems, Confocal microscopy, Microelectromechanical systems, Charge-coupled devices, Imaging systems, Aluminum

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SPIE Journal Paper | 10 June 2013

MOEMS tunable microlens made of aluminum nitride membranes

Steffen Leopold, Tobias Polster, Daniel Paetz, Fabian Knoebber, Oliver Ambacher, Stefan Sinzinger, Martin Hoffmann

JM3, Vol. 12, Issue 02, 023012, (June 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.2.023012

KEYWORDS: Aluminum nitride, Microopto electromechanical systems, Microlens, Lenses, Spherical lenses, Nitrogen, Semiconducting wafers, Manufacturing, Silicon, Solids

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Proceedings Article | 13 March 2013 Paper

Tunable cylindrical microlenses based on aluminum nitride membranes

Steffen Leopold, Daniel Paetz, Fabian Knoebber, Oliver Ambacher, Stefan Sinzinger, Martin Hoffmann

Proceedings Volume 8616, 861611 (2013) https://doi.org/10.1117/12.2005131

KEYWORDS: Aluminum nitride, Silicon, Cylindrical lenses, Finite element methods, Silica, Lenses, Micro optics, Silicon films, Deep reactive ion etching, Beam shaping

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Proceedings Article | 13 March 2013 Paper

Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode

E. Markweg, M. Hoffmann

Proceedings Volume 8616, 86160A (2013) https://doi.org/10.1117/12.2003625

KEYWORDS: Waveguides, Refractive index, Silicon, Integrated optics, Scanners, Waveguide modes, Silicon films, Collimation, Silica, Thin films

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Proceedings Article | 13 March 2013 Paper

Aluminum nitride supported 1D micromirror with static rotation angle >11°

Stefan Weinberger, Martin Hoffmann

Proceedings Volume 8616, 86160E (2013) https://doi.org/10.1117/12.2002288

KEYWORDS: Mirrors, Aluminum nitride, Silicon, Electrodes, Micromirrors, Aluminum, Electroluminescence, Actuators, Neodymium, Measurement devices

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Proceedings Article | 18 December 2012 Paper

Planar plano-convex microlens in silica using ICP-CVD and DRIE

E. Markweg, M. Hillenbrand, S. Sinzinger, M. Hoffmann

Proceedings Volume 8550, 85500T (2012) https://doi.org/10.1117/12.981266

KEYWORDS: Refractive index, Collimation, Microlens, GRIN lenses, Silicon, Deep reactive ion etching, Beam shaping, Silica, Geometrical optics, Optical components

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Proceedings Article | 5 May 2011 Paper

AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation

Stefan Hampl, Volker Cimalla, Tobias Polster, Martin Hoffmann

Proceedings Volume 8066, 80661E (2011) https://doi.org/10.1117/12.886881

KEYWORDS: Aluminum nitride, Electrodes, Beam shaping, Eye, Thin films, Silicon, Energy harvesting, Sensors, Etching, Transducers

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Proceedings Article | 5 May 2011 Paper

Non-electrical-power temperature-time integrating sensor for RFID based on microfluidics

Mike Schneider, Martin Hoffmann

Proceedings Volume 8066, 80661V (2011) https://doi.org/10.1117/12.886768

KEYWORDS: Sensors, Capillaries, Microfluidics, Packaging, Power supplies, Electrodes, Fluid dynamics, Polymers, Product safety, Organisms

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Proceedings Article | 5 May 2011 Paper

Airborne particle generation for optical tweezers by thermo-mechanical membrane actuators

T. Polster, S. Leopold, M. Hoffmann

Proceedings Volume 8066, 80661F (2011) https://doi.org/10.1117/12.886727

KEYWORDS: Aluminum nitride, Particles, Optical tweezers, Actuators, Sensors, Microelectromechanical systems, Silicon, Thin films, Optical spheres, Aluminum

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Proceedings Article | 14 February 2011 Paper

Tunable refractive beam steering using aluminum nitride thermal actuators

S. Leopold, D. Paetz, F. Knoebber, T. Polster, O. Ambacher, S. Sinzinger, M. Hoffmann

Proceedings Volume 7931, 79310B (2011) https://doi.org/10.1117/12.874826

KEYWORDS: Aluminum nitride, Actuators, Silicon, Beam steering, Thin films, Eye, Prisms, Numerical analysis, Image quality, Silica

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Proceedings Article | 13 May 2010 Paper

Tunable compound eye cameras

Daniel Pätz, Steffen Leopold, Fabian Knöbber, Stefan Sinzinger, Martin Hoffmann, Oliver Ambacher

Proceedings Volume 7716, 77160K (2010) https://doi.org/10.1117/12.854532

KEYWORDS: Aluminum nitride, Chemical elements, Eye, Cameras, Actuators, Microlens, Thin films, Image quality, Prisms, Silicon films

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Showing 5 of 15 publications

Conference Committee Involvement (2)

Smart Sensors, Actuators, and MEMS VIII

8 May 2017 | Barcelona, Spain

Smart Sensors, Actuators, and MEMS VII

4 May 2015 | Barcelona, Spain

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