Mr. Miao Yuan Profile

Miao Yuan

at Beijing Institute of Technology

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Publications (3)

Proceedings Article | 13 December 2021 Paper

Lithographic exposure latitude aware source and mask optimization

Lulu Zou, Lihui Liu, Yiyu Sun, Pengzhi Wei, Miao Yuan, Zhaoxuan Li, Yaning Li, Yanqiu Li

Proceedings Volume 12073, 1207302 (2021) https://doi.org/10.1117/12.2604844

KEYWORDS: Source mask optimization, Photomasks, Lithography, Resolution enhancement technologies, Semiconducting wafers, Lithium, Image processing, Electroluminescence, Optical proximity correction, Lithographic illumination

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Proceedings Article | 1 November 2021 Paper

Fast lithographic source pupil optimization using difference of convex functions algorithm for transformed L1 penalty

Yiyu Sun, Yanqiu Li, Guanghui Liao, Miao Yuan, Yang Liu, Yaning Li, Lulu Zou, Lihui Liu

Proceedings Volume 12057, 120570I (2021) https://doi.org/10.1117/12.2604052

KEYWORDS: Lithography, Optimization (mathematics), Algorithm development, Imaging systems, Zernike polynomials, Compressed sensing, Semiconducting wafers, Photomasks, Modulation, Lithium

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Proceedings Article | 1 November 2021 Paper

Comparison of sparse-based full chip source optimization with different bases

Guanghui Liao, Lihui Liu, Yiyu Sun, Pengzhi Wei, Miao Yuan, Zhaoxuan Li, Yanqiu Li

Proceedings Volume 12057, 120570J (2021) https://doi.org/10.1117/12.2604075

KEYWORDS: Lithography, Resolution enhancement technologies, Optimization (mathematics), Optical lithography, Imaging systems

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