Dr. Olga Yu Ridzel Profile

Dr. Olga Yu Ridzel

at National Institute of Standards and Technology

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Publications (1)

Proceedings Article | 27 April 2023 Presentation + Paper

Model validation for scanning electron microscopy

O. Yu Ridzel, W. Yamane, I. Mansaray, J. Villarrubia

Proceedings Volume 12496, 124960T (2023) https://doi.org/10.1117/12.2661103

KEYWORDS: Critical dimension metrology, Electron transport, Dimensional metrology, Scanning electron microscopy, Data modeling, Silicon, Scanning transmission electron microscopy, Vacuum chambers, Physics

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