Dr. Quan Cai Profile

Dr. Quan Cai

at Institute of High Energy Physics CAS

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Publications (2)

Proceedings Article | 9 September 2019 Presentation + Paper

New surface slope profiler with sub-millimeter spatial resolution

Fugui Yang, Ming Li, Quan Cai, Weifan Sheng, Peng Liu, Xiaowei Zhang

Proceedings Volume 11109, 111090O (2019) https://doi.org/10.1117/12.2525488

KEYWORDS: Mirrors, Spatial resolution, Metrology, Calibration, X-rays, Autocollimators, Profilometers

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Proceedings Article | 25 October 2016 Paper

Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method

Fugui Yang, Quan Cai, Peng Liu, Weifan Sheng, Xiaowei Zhang, Ming Li

Proceedings Volume 9687, 968706 (2016) https://doi.org/10.1117/12.2244271

KEYWORDS: Wavefronts, Metrology, Spatial resolution, X-ray optics, Mirrors, Sensors, Digital micromirror devices, Nano opto mechanical systems, Monochromators, Autocollimators

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