Dr. Roy Shtainman
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper
Proceedings Volume 11611, 116111U (2021) https://doi.org/10.1117/12.2582364
KEYWORDS: Interferometry, Silicon, Metrology, Scatterometry, Reflectometry, Transmission electron microscopy, Semiconductor manufacturing, Reflectivity, Polarization control

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