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Dr. Sylvie Jarjayes
at ESRF - The European Synchrotron
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 10 March 1999 Paper
MOEMS at LETI
Patrick Mottier, Eric Ollier, Patrick Pouteau, Karine Petroz, Sylvie Jarjayes
Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341258
KEYWORDS: Sensors, Microopto electromechanical systems, Silicon, Waveguides, Semiconducting wafers, Silica, Electrodes, Integrated optics, Microelectromechanical systems, Etching
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