Mr. Takuma Yamamoto Profile

Takuma Yamamoto

at Hitachi High-Tech Corp

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 22 February 2021 Presentation + Paper

Wei Sun, Yasunori Goto, Takuma Yamamoto, Keiichiro Hitomi

Proceedings Volume 11611, 116110X (2021) https://doi.org/10.1117/12.2592052

Proceedings Article | 20 March 2020 Presentation + Paper

Wei Sun, Pushe Zhao, Yasunori Goto, Takuma Yamamoto, Taku Ninomiya

Proceedings Volume 11325, 113250N (2020) https://doi.org/10.1117/12.2551458

KEYWORDS: 3D modeling, Electron beams, Data modeling, Neural networks, Scanning electron microscopy, Inverse problems, Convolution, 3D metrology

Proceedings Article | 26 March 2019 Paper

Takahiro Nishihata, Mayuka Osaki, Maki Tanaka, Takuma Yamamoto, Akira Hamaguchi, Chihiro Ida, Yusaku Suzuki

Proceedings Volume 10959, 109591B (2019) https://doi.org/10.1117/12.2514799

KEYWORDS: 3D metrology, Scanning electron microscopy, Monte Carlo methods, Calibration, 3D acquisition, Scattering, Nondestructive evaluation

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