Dr. Tohru Satake Profile

Dr. Tohru Satake

General Manager at ULVAC Technologies Inc

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Publications (3)

Proceedings Article | 10 May 2005 Paper

Electron beam inspection system for semiconductor wafer based on projection electron microscopy: II

Tohru Satake, Nobuharu Noji, Takeshi Murakami, Manabu Tsujimura, Ichirota Nagahama, Yuichiro Yamazaki, Atsushi Onishi

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.600445

KEYWORDS: Semiconducting wafers, Inspection, Defect detection, Spatial resolution, Scanning electron microscopy, Distortion, Electron beams, Signal detection, Electron microscopy, Neodymium

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Proceedings Article | 24 May 2004 Paper

Inspection performances of the electron beam inspection system based on projection electron microscopy

Ichirota Nagahama, Atsushi Onishi, Yuichiro Yamazaki, Tohru Satake, Nobuharu Noji

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.534909

KEYWORDS: Inspection, Semiconducting wafers, Signal detection, Electron microscopy, Scanning electron microscopy, Projection systems, Defect detection, Image processing, Wafer-level optics, Prototyping

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Proceedings Article | 24 May 2004 Paper

Electron beam inspection system for semiconductor wafer based on projection electron microscopy

Tohru Satake, Nobuharu Noji, Takeshi Murakami, Manabu Tsujimura, Ichirota Nagahama, Yuichiro Yamazaki, Atsushi Onishi

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536202

KEYWORDS: Inspection, Semiconducting wafers, Electron beams, Signal detection, Optical inspection, Wafer-level optics, Electron microscopy, Spatial resolution, Yield improvement, Imaging systems

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