Dr. Yuichiro Yamazaki
CTO at TASMIT Inc
SPIE Involvement:
Author
Publications (60)

Proceedings Article | 10 April 2024 Presentation + Paper
Masahiro Oya, Yosuke Okamoto, Shinichi Nakazawa, Kotaro Maruyama, Yuichiro Yamazaki, Shinji Murakami, Yoshihiro Midoh, Noriyuki Miura
Proceedings Volume 12955, 129550R (2024) https://doi.org/10.1117/12.3011075
KEYWORDS: Contour extraction, Overlay metrology, Contour modeling, Monte Carlo methods, Image analysis, Scanning electron microscopy, Computer aided design

Proceedings Article | 22 November 2023 Presentation
Proceedings Volume PC12751, PC127510Q (2023) https://doi.org/10.1117/12.2687822
KEYWORDS: Optical proximity correction, Photomasks, Extreme ultraviolet, Calibration, Semiconducting wafers, Scanning electron microscopy, Printing, Modeling, Machine learning, Data modeling

SPIE Journal Paper | 19 October 2023
JM3, Vol. 22, Issue 04, 041603, (October 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.041603
KEYWORDS: Modeling, Data modeling, Semiconducting wafers, Optical proximity correction, Contour modeling, Metrology, Calibration, Stochastic processes, Scanning electron microscopy, Performance modeling

Proceedings Article | 27 April 2023 Presentation + Paper
Benjamin Bunday, Shari Klotzkin, Douglas Patriarche, Yvette Ball, Maseeh Mukhtar, Kotaro Maruyama, Seul-Ki Kang, Yuichiro Yamazaki
Proceedings Volume 12496, 124960W (2023) https://doi.org/10.1117/12.2661179
KEYWORDS: Signal to noise ratio, Monte Carlo methods, Scanning electron microscopy, Optical simulations, Visualization, Oxides, Copper, Metrology, Tungsten, Line scan image sensors

Proceedings Article | 27 April 2023 Paper
Proceedings Volume 12496, 124961W (2023) https://doi.org/10.1117/12.2661180
KEYWORDS: Overlay metrology, Image processing, Distortion, Computer aided design, Imaging systems, Design and modelling, Image enhancement, Edge detection, Signal detection, Semiconducting wafers

Showing 5 of 60 publications
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