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Young-Jun Kim
Enginner for Scannner at SAMSUNG Electronics Co Ltd
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Publications (3)
Proceedings Article | 28 April 2023 Paper
Improvement of CD uniformity using a new selective exposure focusing method
Proceedings Volume 12494, 124940Y (2023) https://doi.org/10.1117/12.2657203
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Sensors, Scanners, High volume manufacturing, Lithography, Optical lithography, Distributed interactive simulations, Device simulation, Process control
Proceedings Article | 11 April 2017 Presentation + Paper
Process margin improvement through finger-print removal based on scanner leveling data
Young Jun Kim, Tony Park, Jeong Heung Kong, Dong Kyung Han, Jin Phil Choi, Young Seog Kang, Se Yeon Jang, Jeroen Cottaar, Jan-Pieter van Delft, Jeroen Rutten, Axel von Sydow, Marcel Bontekoe, Maarten Boogaarts, Arjan Donkerbroek, Ruiyue Ouyang, Balaji Rangarajan, Khalid Elbattay, Andrew Moe, Chung-Yong Kim
Proceedings Volume 10147, 1014709 (2017) https://doi.org/10.1117/12.2258184
KEYWORDS: Manufacturing
Proceedings Article | 22 March 2016 Paper
Holistic, model-based optimization of edge leveling as an enabler for lithographic focus control: application to a memory use case
T. Hasan, Y.-S. Kang, Y.-J. Kim, S.-J. Park, S.-Y. Jang, K.-Y. Hu, E. J. Koop, P. C. Hinnen, M. M. A. Voncken
Proceedings Volume 9778, 97783G (2016) https://doi.org/10.1117/12.2219121
KEYWORDS: Semiconducting wafers, Scanners, Servomechanisms, Sensors, Optimization (mathematics), Lithography, Yield improvement, Model-based design, Control systems, Process control
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