Dr. Yan Feng
at Synopsys, Inc.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper
Elizabeth Grubbs, Bernd Kuechler, Hyesook Hong, Enas Sakr, Lena Zavyalova, Folarin Latinwo, Delian Yang, Linghui Wu, Yan Feng, Kevin Lucas
Proceedings Volume 12954, 129540S (2024) https://doi.org/10.1117/12.3013125
KEYWORDS: 3D modeling, Modeling, Lithography, Data modeling, Calibration, Deep ultraviolet, Optical proximity correction, Extreme ultraviolet, Photoresist processing, Shrinkage

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