Unspecified Zoi Dardani Profile

Zoi Dardani

at ASML Netherlands BV

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Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper

Local variables measured using large field of view SEM images

Salman Mokhlespour, Ellaheh Barzegar, Willem van Mierlo, Zoi Dardani, Peter Sprau

Proceedings Volume 12955, 129551Y (2024) https://doi.org/10.1117/12.3006277

KEYWORDS: Line edge roughness, Line width roughness, Semiconducting wafers, Scanning electron microscopy, Distortion, Stochastic processes, Metrology, Bias correction, Error analysis

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Proceedings Article | 12 May 2020 Presentation + Paper

Extending EUV lithography for DRAM applications

Gijsbert Rispens, Claire Van Lare, Dorothe Oorschot, Rik Hoefnagels, Shih-Hsiang Liu, Willem Van Mierlo, Nadia Zuurbier, Zoi Dardani, Ziyang Wang, Mark John Maslow, Jo Finders, Roberto Fallica, Andreas Frommhold, Eric Hendrickx, Ardavan Niroomand, Scott Light

Proceedings Volume 11323, 113230U (2020) https://doi.org/10.1117/12.2552067

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Nanoimprint lithography, Extreme ultraviolet lithography, Finite element methods, Optical lithography, Photomasks, Extreme ultraviolet, Stochastic processes, Inspection

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