CONFERENCE PROCEEDINGS
Advanced Search
Chanseob Cho
Senior Principal Engineer at GlobalFoundries
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 19 March 2015 Paper
Overlay target selection for 20-nm process on A500 LCM
Vidya Ramanathan, Lokesh Subramany, Tal Itzkovich, Karsten Gutjhar, Patrick Snow, Chanseob Cho, Lipkong Yap
Proceedings Volume 9424, 942424 (2015) https://doi.org/10.1117/12.2086016
KEYWORDS: Metrology, Diffractive optical elements, Optical properties, Etching, Inspection, Scatterometry, Semiconducting wafers, Overlay metrology, Back end of line, Front end of line
Proceedings Article | 8 October 2014 Paper
Best-practice evaluation-methods for wafer-fab photomask-requalification inspection tools
Proceedings Volume 9235, 92351I (2014) https://doi.org/10.1117/12.2068466
KEYWORDS: Reticles, Contamination, Defect detection, Air contamination, Particles, Inspection, Image analysis, Photomasks, Optical proximity correction, SRAF
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top