This PDF file contains the front matter associated with SPIE Proceedings Volume 12073, including the Title Page, Copyright information, and Table of Contents.

Source and mask optimization (SMO) technology is an increasingly important resolution enhancement technology (RET) that can optimize the source and mask. Various SMO methods have made great progress in terms of computational efficiency and pattern fidelity. Besides, process window (PW) is also an important indicator to evaluate the performance of lithography imaging. PW consists of exposure latitude (EL) and depth of focus (DOF). However, currently, there are few SMO methods that can directly improve EL. In this paper, we propose an EL aware SMO (ELASMO) method by innovating a new penalty function for improving the exposure latitude. Compared to the conventional SMO, the proposed ELASMO can significantly enhance aerial image contrast and enlarge the exposure latitude from 5% to 11% under the premise of ensuring imaging fidelity. ELASMO achieves high-fidelity lithography in a larger process window.

Since the hole distance, quantity of holes, size, etc. of the pre-perforated tipping paper cannot be adjusted during production, the problems caused by the its function is: on the one hand, the filter ventilation rate cannot be adjusted in real time with low stability; on the other hand, the corresponding consumption and cost of the raw materials are high. Therefore, an online laser perforating device is designed. By directly performing 360° laser perforation on the surface of the semi-finished cigarette, the stability of the ventilation rate of the cigarette filter can be effectively controlled and the production cost can be reduced. The application results shown that the use of online laser perforation device, by adjusting the perforation time, quantity and size of the hole, the average pass rate of the filter ventilation rate has increased by 17.3%, and the standard deviation pass rate has increased by 10.8%, which effectively improves the stability of ventilation rate for the filter. The average consumption cost of the materials for every 10,000 cigarettes of a certain brand is reduced by 41.2%, which effectively reduces the cost of cigarettes, and can set the different quantity of perforating holes and the filter ventilation rate values according to process requirements.

In this report, we demonstrate light manipulations in nanoscale within hydrogel phase, where programmable modifications on the optical response functions of such bio-integrable optical platforms are endowed incorporating the quantum effects and surface plasmon effects of noble nano metals. Herein, enabled by the high resolution ultrafast direct laser printing toolkits, we present the capability of molding radiation emission of the flexible platforms in sub-diffraction limit regime by direct printing and patterning of nano silver. Further, we show that functional nanodevices can be attained via the additive 2D/3D laser nanostructuring in interior of the crosslinking matrices, through which a hydrogel-based nanostructures with extraordinary photoluminescent and surface enhanced Raman scattering (SERS) nanostructure is presented as a prototypical demonstration of functional hydrogel-integrated devices. Endowing customized multi-functionalization of hydrogels, this scheme opens new opportunities for the micro/nano fabrication of alluring high-performance soft optics for versatile bio-applications.

The micro-intersecting cylindrical mandrel is a kind of high precision optical micro-nano element in the inertial confinement fusion (ICF) experiment. It has a complex structure and high precision requirement, and its machining quality directly affects the accuracy of ICF experiment. In this paper, the ultra-precision milling technology of polycrystalline oxygen-free copper micro-intersecting cylindrical mandrel was carried out. The composition of the surface defects after cutting were determined, and the formation mechanisms of different defects were analyzed. The optimal ultra-precision milling process was designed. The surface roughness Ra value of the machined cylinder 1 is 16 nm, and the Rq value is 21 nm. The surface roughness Ra value of the machined cylinder 1 is 20 nm, and the Rq value is 24 nm. Besides, the boundary defect in the transition arc region was eliminated. Finally, the polycrystalline oxygen-free copper micro-intersecting cylinder part with high surface quality and near no defect was manufactured after ultra-precision milling.

In order to improve manufacture quality and machining efficiency, this paper studies the technology of rectangular flat-topped beam. Flat-topped beam can effectively reduce the region of heat affected zone. Rectangular beam can reduce overlap rate. So, it is very important to convert the circular Gaussian beam to rectangular flat-topped beam. The fiber laser has been widely used to laser manufacture Industry at this present. The fiber has better coupling capability with laser spot. We choose double-cladding fiber to acquire uniform rectangular beam. Laser beam transmission model was created up with RP fiber power soft. We also make the model of the double-cladding fiber. When the Gaussian beam is transmitting along fiber, high-order mode lights appear and mixture with each other. Because the double-cladding fiber has central-dip profile index, the energy transfers from central to edge. The results show that the double-cladding fiber can be used to improve the uniformity of transmitting beam. When the shape of fiber core is rectangular and the chamfer is circle arc work, we can get rectangular uniformity beam.

The readily accessible commercial electron beam lithography (EBL) has high-accuracy and mask-free characteristics which enable fast exploration of novel on-chip devices. However, current EBL technique would be challenging to solve the dilemma between high accuracy and large writing field. Here we report an effective recipe to fabricate such multiscale photonic devices. It is realized by improving the standard procedure of stitching small writing fields with alignment markers. The key is the small patterns stitching and exposure alignment process. We divide the large design structure into several small patterns and take pictures of their corresponding alignment markers by the EBL instrument itself with exactly the same parameters used in the subsequent e-beam exposure. As such, the exposure alignment errors caused by calibration procedures are completely eliminated. We precisely write the divided patterns to desired locations by their surrounding markers and finally achieve gapless and precise stitching within the whole photonic circuit. The protocol is demonstrated by a Mach-Zehnder Interferometer (MZI) structure on a 200nm thick Si₃N₄ chip, in which nano-scale grating coupler have been clearly developed. Compared with traditional EBL technique, the connection accuracy of a waveguide between adjacent writing fields has been significantly improved to be less than 10 nm even without a laser interferometric stage. Moreover, due to the stitching mechanism, the maximum chip size for exposure becomes limitless and could reach up to the entire wafer. Our technique greatly expands the fabrication size of EBL while maintaining its high resolution and opens more opportunities to the development of integrated photonic circuits.

In this work, superwetting alumina coating was coated onto flexible copper mesh by one-step laser cladding treatment. In order to understand the formation mechanism of microstructured coating, the dynamic temperature field distribution during laser cladding is investigated by establishing a three-dimensional finite element simulation model based on the transient thermal analysis method. As the heat source moves, the temperature of the substrate surface increases from room temperature to over 660℃, allowing the aluminum to reach its melting point where melting occurs on the substrate surface. The effect of laser power on the distribution of alumina nanoparticles deposited on copper mesh was further investigated in consideration of temperature field distribution. When the laser power was increased to 1.2 times the initial power, the maximum temperature of the cladding layer increased to about 1930℃, which facilitated the formation of smaller size nanoparticles. It was found that the as-prepared substrate transits from hydrophobicity in air with WCA~125 ° to superhydrophilicity in air with WCA near 0°, while turning oleophobicity with OCA 110°to superoleophobicity with OCA~160°underwater. Oil/water separation was performed on as-prepared superwetting alumina coating coated copper meshes to reveal the enhancement mechanism behind.

In order to improve the hardness and wear resistance of TC4 alloy under extreme service conditions in aerospace, FeCoNiCrAl high-entropy alloy(HEA) coatings are prepared on the surface of TC4 alloy using direct laser deposition technology. The result shows that the direct laser deposited FeCoNiCrAl HEA coating formed a good metallurgical bond with the TC4 alloy substrate, and the FeCoNiCrAl HEA is deposited in a single-phase body-centred cubic daisy-like equiaxed grains structure with an average grain size of 8.49 μm, and the grains were randomly distributed in (001), (101) and (111) and without obvious preferential growth direction. Elemental segregation was observed in the coating, with Al, Co and Ni elements segregating into the daisy-like equiaxed grains and Fe and Cr elements segregating between the dendrites, while Co, Cr and Ni elements are find to diffuse into the transition region(TR). The average microhardness of the direct laser-deposited FeCoNiCrAl HEA coating is 611.8 HV_0.5, which is 1.6 times of that in TC4 alloy (374.9 HV_0.5), and the average microhardness of the TR is 699.1 HV_0.5 due to the significantly finer dendritic structure and the solid solution strengthening effect of Co, Cr and Ni elements, which is approximately 1.8 times that of the TC4 alloy substrate

Ti6Al4V/Inconel 718 functionally graded material combines the advantages of the two materials, it can fully meet the requirements of high temperature resistance, high strength and light weight in the extremely harsh environment of aerospace. Ti6Al4V/ Inconel 718 functional gradient materials were prepared by directed laser deposition. Scanning electron microscopy and electron probe micro-analysis were used to observe the microstructure and element distribution of functional gradient samples. The mechanical properties of the functionally graded sample were measured by Vickers hardness tester. The results show that the interface between Ti6Al4V and Inconel 718 is cleavage fracture, and the cleavage fracture is related to the formation and concentration of Ti2Ni, NiTi and Ni3Ti intermetallic compounds. A well-formed gradient sample is prepared by using gradient transition. Through the effective gradient transition form(100%Ti6Al4V- 90%Ti6Al4V/10% Inconel 718-80% Ti6Al4V/20% Inconel 718-100% Inconel 718), the element inhomogeneity at the interface is alleviated and a good metallurgical bond is formed. Along the gradient direction, the microhardness gradually increases with the increase of Inconel 718, reaching the maximum of 811HV. The reason for the increase in hardness is related to solid solution and precipitation strengthening of Ti2Ni intermetallic compounds.

Optical lithography with high numerical aperture has a significant modulation effect on the polarization state of the light field, which affects the imaging quality of the system. Due to the selectivity of the optical system to the polarization state, incident different polarized light fields will change the imaging quality of the system. Therefore, studying the influence of the lithography system on the polarized light field is helpful to improve the imaging quality. The polarization effect of lithography system is calculated based on polarization ray tracing method in this paper. The polarization state changes of incident scalar light field and vector light field are analyzed, and the ellipticity and azimuth on the exit pupil of system is calculated.

The research of CO₂ laser smoothing fused silica to achieve smooth surface was investigated by simulations and experiments. Micro-flow smoothing of fused silica was numerically simulated. In the experiments, the influence of processing parameters, such as P (laser power), v (scanning velocity) and d (scanning path pitch) were taken into account on surface roughness (Ra) after laser irradiation. The results show that the roughness is rapidly reduced from 183.6nm to 14.27nm under P=35W, v=0.2mm/s, d=1.0mm, and thus the smooth surface is obtained. On the other hand, the raster structure will appear on the surface at inappropriate parameters (P=30W or v=0.5mm/s or d=2.0mm). The surface roughness highly influenced by raster structure ranges from ~40nm to ~140nm, 140.9nm for P=30W, 71.6nm for v=0.5mm/s, 41.3nm for d=2.0mm.

Inner-surface laser cladding method has great potential on industry communities. A novel RILC (Rotatable Inner-surface Laser Cladding) equipment was developed to prepare inner-surface cladding layer for heavy or asymmetric work piece. Wear resistance cladding layer was prepared onto the inner-surface of aluminum cylinder by RILC method. The cladding layer greatly increased the hardness of inner-surface, and exhibited high wear resistance and relatively low friction coefficient based on pin-on-disk wear test. Thermocouples were applied to study the thermal cycling of the substrate during cladding process.

A new structure of side powder feeding nozzles for extreme high-speed linear laser material deposition was designed. In this structure, the spatial concentration distribution of powder flow is controlled by multi-channel cylindrical beam splitting and conical rectifier. The turbulent and discrete phase models were used to study the flow field and powder distribution under the conditions of specific carrier gas flow rate and powder size. The results show that the powder feeding shaping structure can realize the powder flow linear and uniform distribution. Besides, it is proved that the prepared cladding layer has good surface quality through the experimental investigation.

With the increasing requirement of lithographic resolution, the degradation of 3D mask effect on imaging cannot be ignored. The researches of its polarization properties and effect on imaging are of great significance to the development of imaging-based aberration measurement techniques and computational lithography. In this paper, a novel method for comprehensive and quantitative characterization of 3D mask effect is proposed. By comparing the far-field spectrum of Kirchhoff model and 3D mask model, the 3D mask effect is comprehensively and quantitatively characterized as the form of polarization aberration. Pupil-spectrum comprehensive analysis method and background glitch noise culling method are proposed to improve the systematicness and accuracy of 3D mask characterization. The simulation comprehensively analyzes the effect of mask line width and absorber thickness on all polarization properties of the 3D mask effect, showing that this method can provide a more comprehensive analysis of the 3D mask effect compared with the previous methods.

In this paper, a kind of photo-alignment materials of liquid crystal with nano-structured is introduced. The samples differ in optical anisotropy, which are subjected to different pre-bake temperatures and different exposure energy. The optical anisotropy are predicted by Secondary fitting analysis. The rationality of the fitting equation was verified by AFM test on the material surface.

This article introduces an image quality compensation method based on tolerance sensitivity matrix analysis. First, use the optical software CODE V to establish an optical system model, and add tolerances to a set of i-line projection objectives with a numerical aperture of 0.33. Then the singular value decomposition (SVD) is performed on the sensitivity matrix composed of the structural parameters of the system's sensitive components to select the image quality compensator. The image quality is compensated by coupling the determined three compensators to each other. Comparing the performance of the compensated lithography objective lens with the tolerance lithography objective lens, the system wave aberration is converged from 33.5nmRMS to 23.9nmRMS, the wave aberration PV value is reduced from 0.07λ to 0.02λ for the tolerance objective lens, and the distortion is reduced from 491nm to 48.6nm. The rate is reduced from 0.03ppm to 0.01ppm. This study uses fewer compensators to restore the system wave aberration, distortion and magnification to close to the design level, effectively reducing the manufacturing difficulty and cost of the projection lithography objective lens, and verifying the effectiveness of the compensation method and model.

Aluminum alloy mirror by additive manufacturing (AM) has attracted much attention in recent years because of its excellent strength, machinability, and high design freedom. This paper describes the machining process of lightweight mirror based on AM AlSi10Mg body. The mirror is processed to the accuracy of 45.6 nm in RMS, and the surface roughness reaches 0.585 nm in Rq. Initially, the mirror substrate is processed using selective laser melting (SLM) with AlSi10Mg powders. Then the backside surfaces and optical front surface of the mirror substrate are processed by CNC turning and single-point diamond turning (SPDT). After the Nickel-Phosphorus (NiP) coating is electroplated, ultra-precision machining is used to process the optical surface finally, in which, SPDT and magnetorheological finishing (MRF) is used to ensure the surface accuracy. Then subsequent polishing eliminated low frequency stripes and MRF marks, significantly reducing the roughness. In addition, the thorough release of internal stress is an important factor to ensure the stability of the surface accuracy. The experiment results prove that the process chain can satisfy the ultra-precision fabrication of infrared optical surface and the roughness has the potential to be applied in ultraviolet optical system.

The physical characteristics of silicon carbide materials, such as brittle texture and high hardness, make it very difficult to form complex structures. Additive manufacturing can realize the direct molding of complex structure silicon carbide mirrors, improve processing efficiency, and reduce processing costs. In this paper, an additive silicon carbide mirror substrate is processed by the combined process of grinding, lapping, and polishing with a small grinding head. After obtaining a certain surface shape accuracy, the surface was modified to obtain a silicon modified layer with a thickness of 10 μm. After two times of magnetorheological modification of the modified layer, the surface shape converged to 17.313nm RMS. After a conformal smoothing, the surface quality was 1.109nm Ra, which verified the machinability of the additively manufactured silicon carbide mirror.

In some optical systems, high requirements are put forward for the roughness of the thin-walled side of infrared materials, and ultra-precision grinding is needed. In this paper, the removal of residual tool marks in the side forming process of such parts is studied, and the influence of two different grinding methods of fixed abrasive on the side roughness is analyzed, and polycrystalline magnesium fluoride (MgF₂) is taken as the research object. Firstly, the comparative experiment of peripheral grinding on the side of MgF₂ is carried out by using diamond grinding wheel with different particle sizes, and then the end grinding is carried out by using different particle sizes of pellets. It is proved that the tool marks can be removed by end face grinding, and the surface roughness Ra decreases from 1.4241μm to 0.0458μm.

Surface of fused silica optical components were polished by Ion Beam Figuring (IBF) ultra-precision process. Based on the analysis of the relationship between the ion beam current density distribution parameters obtained by faraday scan and the removal function, the removal function model for IBF was established. The IBF experiment for fused silica optical materials were carried out. The experimental results show that the IBF method based on faraday scan can achieve the same figure correcting ability as the traditional IBF method based on line scan experiment. But the offline calculation time of the removal function can be reduced from 2 hours to 5minutes, which improves the efficiency of IBF greatly. After several cycles the initial surface figure error of the optical element before processing, with a PV value from more than 500 nm to less than 15nm and an RMS value from more than 120nm to less than 1.5 nm. Ultra-precision surface of fused silica optical components with nanometer scale were obtained by IBF.

With the developments of optical design, testing and manufacturing technology, aspherical optics are applied more often. However, high precision aspherical optics are not widely used in many fields due to the high cost of manufacturing. In order to reduce the cost, an approach to realize the fast manufacturing of high precision aspherical optics is proposed. The bonnet polishing, computer controlled optical surfacing (CCOS) and magnetorheological finishing (MRF) are utilized in combination during the manufacturing process. Firstly, the rough polishing of the aspherical optics is accomplished by bonnet polishing. Secondly, the surface error are smoothed to reduce mid-frequency surface error by CCOS smoothing polishing equipment. Finally, the deterministic manufacturing is carried out by MRF equipment. The fast manufacturing technology has been applied on a paraboloidal mirror of 237mm in diameter. The experimental results show that aspherical optics can reach λ /60 (rms, @λ =632.8nm) in 33 hours by using the combined manufacturing technology. The fast manufacturing technology can provide high precision and high efficiency for aspherical optics.

To achieve rapid and accurate detection of the surface roughness of optical elements, a surface roughness detection method based on region scattering was proposed in this paper. Firstly, starting from the basic principle of the angle-resolved scattering method, a surface roughness detection model based on the area scattering distribution is established. Then, the influence of incident angle, incident wavelength, etc. on the scattering distribution is simulated and analyzed, and the best sampling region of the scattering distribution is determined. Finally, the experiment completes the acquisition and processing of the surface scattering distribution of the optical elements, and the dynamic range of the scattering distribution is improved through the fusion of the multi-exposure scattering image, thereby realized the high-precision detection of surface roughness. Take optical components as test objects, the experimental results show that the use of regional scattering signals to characterize the surface roughness of components can improve the measurement speed while ensuring the measurement accuracy.

Polarization aberration of projection optics should be measured, controlled and compensated accurately in high numericalaperture image optical system, such as lithography tools for technical node of 14-5 nm. In this paper, we develop a threestep eigenvalue calibration method for polarization aberration measurement in-situ accurately. The whole system and subsystems can be calibrated by using the wide-view-angle quarter-wave plate as one of the reference samples. In addition, an experimental tool is developed to implement the proposed method, which is of significant importance to quantify and improve the properties of the projection optics in lithography.