This PDF file contains the front matter associated with SPIE Proceedings Volume 7381, including the Title Page, Copyright information, Table of Contents, the Conference Committee listing and the Introduction.

Space optical remote sensor is very important in many fields of science and military significance. It is widely applied. Space optical remote sensor design and manufacturing require precision and stability. Focusing mechanics is an important component of remote sensors. Focusing mechanics can guarantee the stability of the entire mechanics focusing accuracy, therefore the stability of research focusing mechanics is very important. In order to guarantee the space optics remote sensor focusing mechanics the stability, takes steps the space optics remote sensor focusing organization mechanics characteristic analysis from the classics contact theory. This article uses international general non-linear finite element analysis software ABAQUS to carry on mechanics characteristic analysis to the space optics remote sensor focusing mechanics. First acts according to the focusing mechanics unique feature, carries on the finite element to the structural model the grid division, the material attribute disposition and the boundary condition indeed grades. Then establishment contact non-linear finite element model, and to focusing organization finite element model infliction unit action. Like this contacts the result and the equivalent static analysis result which the nonlinear analysis obtains carries on the contrast and the analysis. This article last count result modality is 90HZ, satisfies the space optics remote sensor structure overall modality to request to be bigger than 50HZ.This article when carries on the dynamic analysis, extracts the structure kinetic energy and the acceleration curve. In the dynamic analysis obtained transient response analysis modality 70.5Hz, this also is bigger than 50HZ. The dynamic analysis indicated the structure dynamic stability has the distinct enhancement, has provided certain foundation for the space optics remote sensor following development work, reduced the overall system development cycle.

ZnO is the most promising material for the application of an ultraviolet (UV) detector. However the shortage of ptype ZnO becomes the biggest blockage for fabricating ZnO-based semiconductor device. In this paper, following experiments had been done: Firstly, the zinc nitride powders were synthesized through the nitridation reaction of Zn power with NH3, and the optimized synthesis temperature was at 600°C. Next, the zinc nitride powder was fabricated into a zinc nitride sputtering target by a single pressing process. Thirdly a thin layer of zinc nitride film was formed on silicon and quartz substrate using magnetron sputtering method. Fourthly, the zinc nitride film was oxidized into p-type ZnO, and the best optimized temperature for forming p-type ZnO by oxidizing Zn₃N₂ thin film was at 500°C. Lastly, the ohmic contact for p-ZnO and ZnO based detector were fabricated. It was found Al and Ni/Au showed ohmic contact properties to n- Si and p-ZnO, respectively, and the p-ZnO/n-Si junction as a UV detector was feasible.

Magnetic resonance imaging (MRI) has become an indispensable aid to diagnosis and treatment. As the doctor cannot accompany the patient, it is essential that the patient be monitored remotely to avoid the risk of respiration being impaired by anesthetic drugs or upper airway obstruction. A smart wearable textile sensing system is described in this paper. A fiber Bragg grating (FBG) with polymer encapsulation has been woven into an elastic bandage to detect the respiration motion. According to the strain principle of FBG, the breathing rate and intensity can be obtained by measuring the variety of FBG reflected wavelength. In order to eliminate the temperature cross-sensitivity, a FBG temperature sensor has also been woven into the bandage to achieve the temperature compensation computing. Based on the tunable Fabry-Perot filter wavelength demodulated theory, wavelength measuring method and data processing arithmetic have been presented, and the system with ARM microprocessor has been designed to process and display the breathing information. The experiments to the system have proved that the wavelength measuring range is about 40nm, the resolution of wavelength can arrive at 2pm, and the sampling rate is 5Hz.

A distributed optical fiber temperature and strain sensing system using the Landau-Placzek Ratio (LPR) has been introduced. By applying LPR to simultaneous measurement system of temperature and strain based on Brillouin optical time domain reflectometer (BOTDR), the infulence of fiber attenuation, splice loss, and microbending loss on measurement result could be eliminated. This paper has presented a simultaneous measurement system of temperature and strain based on LPR. The light source configuration and method to improve polarization-induced fading used in the system are discussed. At last, the measurement accuracy and its effect factors are also been analyzed.

With the use of the excitation fluorescence spectra of algae, Portable Algae Classification Fluorometer (PACF) made the rapid and in situ classified measurement of the algae come true. In order to improve real-time capability and stability of the system, a system-embedded instrument is designed based on ARM7 and μCOSII. The system, with the advantage of strong real-time and stability, small size, low cost and convenient extension, can satisfy the needs for long-term stable operation in field environment.

Hf ⁴⁺ -doped and undoped (028)-oriented Bi₄Ti ₃O₁₂ ferroelectric films with the same thickness have been deposited on two SrRuO₃ -covered (111)-oriented SrTiO₃ substrates by pulsed laser deposition (PLD). The structures of the two films were studied by x-ray diffraction (XRD). It was found that the Hf⁴⁺ ion doped at site B has greatly improved the remnant polarization and fatigue property. That because the Hf⁴⁺ ion has changed the structure of Hf⁴⁺ -doped Bi ₄ Ti ₃ O₁₂ film a lot including a tensile strain along a axis, a triple-domain structure and distortion of oxygen octahedral which result in an increase of the remnant polarization. And the triple-domain structure and the reduction of oxygen vacancies also caused by Hf⁴⁺ ion doping improved the fatigue property.

By the numerical simulation based on the finite-difference time-domain method, we investigate the adjustability of image distance for the same object distance in two-dimensional (2D) photonic crystals (PCs). When we add a fraction of a metallic component to the center of each dielectric bar, the PC slab lens can form a non-near- field image and the image distance changes for different surface terminations formed by introducing cylinders at the surface layers whose geometric and physical parameters are different from those of the PC bulk. Furthermore, the image distance can be further tuned by combining the two kinds of cylinders at the surface layers with different ratios of slab length. These simulation results clearly show that the imaging properties can be controlled effectively by changing the surface termination of PC slab lenses.

To form a better uniform metal nano-particles (Nps) film, the spatial distribution of Nps produced by femtosecond (fs) pulsed-laser deposition (PLD) method has been studied in detail. Firstly, the spatial distribution of Nps is collected by a slice of harden plastic under different laser fluence. Secondly, the deposition slices are scanned into jpg images. Then, the gray intensity of Nps deposit in the images has been used to have information of the number of deposited Nps. The data are analyzed by Matlab, Excel and Origin software. Experimental results show that the Nps' spatial distribution is following the Anisimov gas expansion model, in which a k value shows a descending trend with the increasing of laser fluence. Most Nps are flying to a narrow angle θ (θ≈0-30 degree), which is departing away the vertical direction of material surface. A 3cm deposition distance and θ≈30 degree are chosen to deposit Cu Nps film. The deposited Cu film seems not very compact and the Nps can be seen clearly in 0.7 J/cm² with 500s deposition time, and the growing velocity of Cu film is near 0.14-0.16 nm/s.

As one kind of the latest forms of biometrics, the human hand vein recognition utilizes a state-of-the-art recognition algorithm based on unique veins and capillaries found on human dorsal hand, which possesses the advantages such as well anti-falsification and high noise immunity. For the hand vein recognition, the most important premise is acquiring the high quality hand vein image. According to the special effect of human hand vein on the near infrared (NIR), when a hand is scanned by an image sensor, the vein pattern appears darker than its surroundings. Depending on this characteristic, the NIR light source was utilized to illuminate the image acquisition system for hand vein. And the optimal parameters of light source were chosen and the light source with high uniformity illuminance was manufactured to acquire the more clear hand vein image. Simultaneously, for the purpose of system miniaturization and design flexibility, the embedded image acquisition system for hand vein was designed based on the technology of system on programmable chip (SOPC). FPGA and CMOS image sensor were taken as the core components in the system, and the hardware of acquisition module is realized by configuring NiosII soft-core CPU and some corresponding interface modules on a FPGA. The software was developed by using the NiosII IDE to realize the initialization control to CMOS image sensor and collection, storage and transmission for the image data gathered from CMOS. Then the collected hand vein image was simply preprocessed, which further improved the image quality. Through experiments, the results indicated that this system could obtain the hand vein image with high performance, and it supplied the embedded development platform for hand vein recognition simultaneously. It was significant to develop the hand vein recognition system with small size and high speed.

Er³⁺ and Li⁺ codoped Y₂O₃ nanocrystals has been prepared by sol-gel method. Upconversion spectrum and properties of Er³⁺ has been studied under excitation at 976 nm. Fluorescence intensity ratio of ²H_11/2 and ⁴S_3/2 subband levels in the Er³⁺ and Li⁺ codoped Y₂O ₃ nanocrystals have been studied as a function of temperature. In the temperature range of 295-723 K, the I_525nm/I_561nm has the highest thermal sensitivity the maximum sensitivity is approximately 0.016 K^-1. The Y₂O₃: Er³⁺/Li⁺nanocrystals with high fluorescence efficiency and the higher temperature revolution, indicated that it is promising for applications in optical high temperature sensor.

In this paper, we report surface and electromechanical properties of polydimethylsiloxane (PDMS) films prepared by a modified molding technique. The film with thickness = 4 μm was deposited on oxidized silicon wafer by the modified molding technique and corresponding elastic modulus of the bulk PDMS materials is equal to 36 kPa. Surface morphology of the film was examined by optical interferometer and Scanning Electron Microscope (SEM). Its roughness is ~ 10 nm and wave-liked structures were locally observed on the film surface. In order to investigate electromechanical performance of the film, sandwich structured multilayer films Au (patterned electrodes, 150 nm) /PDMS (4 μm) /Au (top un-patterned electrode, 50 nm) were deposited on the oxidized silicon wafer. The displacement ratios of the PDMS film parallel to electric fields were characterized from 0 V/μm to 52.5 V/μm and maximum value of the displacement ratio reaches ~ 5.0 %. Meanwhile, the rising and falling response time of the PDMS films are reported as a function of applied electric fields. Since the good light reflection of top gold electrode and displacement ratio of the sandwich-structured films, the multilayer films device might be a proper candidate for the application of spatial light modulator.

There mainly is laser digital photofinishing technique and digital photofinishing technique based on LCD consisting of TFT and LCOS in the digital photofinishing field at the present time. The former have a good many merit such as wide color gamut, high processing rate, large output size and high brightness, but his cost is very high, his maintain technique being comparatively complex, that result in difficult use for people. The utilization ratio of the latter is low because of lower resolution and lower aperture ratio for LCD, but the digital photofinishing based on LCD have lower cost and higher utilization ration, being suitable for people's current standard of living. Considering above mentioned problem, a micro-motion exposure method based on PZT piezoelectric ceramics used in digital image photofinishing is presented. The two-dimension micro-motion exposure system consisting of PZT piezoelectric ceramics, LCD panel, polarizing film and spring strip is designed. By means of PZT piezoelectric ceramics the LCD panel is removed about the one half of the pixel size of the LCD panel for four times from the original place, at the same time imaging system is exposed four times at the printing paper. The software is used to control the time synchronization, the exposure time and motion range of the LCD panel. The system has advantages such as shorter response time than 0.1seconds, lesser motion error than 0.01 microns, high stability and repeatability. Experimental results show that the proposed micro-motion exposure method improve the picture brightness and enlarge output size, at the meantime reducing the cost of the system.

In_0.82Ga_0.18As was grown by low-pressure metalorganic chemical vapor deposition (LP-MOCVD) on InP substrates with two-step growth technique. Three groups sample with different buffer growth conditions were analyzed by Raman scattering. The intensity of GaAs-like LO phonon of Raman scattering, the frequency shift of the GaAs-like LO phonon and asymmetry ratio [symbol] of GaAs-like LO phonon of samples were characterized the optical property of In_0.82Ga_0.18As epilayer, respectively. The results of experiments showed that the optimum buffer In content was 0.82, the optimum buffer thickness was about 100 nm, and the optimum buffer growth temperature was about 450 °C.

(Pb,La)(Zr,Ti)O₃ (PLZT) thin films were grown epitaxially on MgO(001) substrate by radio frequency magnetron sputtering. Different ridge-type waveguides, including a Mach-Zehnder interferometer with co-planar metal electrodes, were defined in the PLZT epilayer using standard photolithographic techniques. The propagation losses for transverse electric polarized infrared light (λ₀ = 1550 nm) in these ridge-type channel waveguides were measured at ~10 dB/cm. Electro-optic modulation was demonstrated with a half-wave voltage V_π ≈ 150 V for a 3 mm interaction length, corresponding to a Pockels coefficient r₅₁ ≈ 8.3 pm/V. Photonic crystal slabs (PCSs) were defined by etching a hexagonal two-dimensional lattice of holes in prepatterned ridge-type waveguides, using a focused ion beam. The sidewalls of the etched holes were inclined by an angle of ~10°. The impact on the transmission properties of these PCSs caused by out-of-plane structural asymmetries, such as deviation from a cylindrical shape of the FIB-etched air holes and the presence of a substrate with refractive index different from that of air, was investigated by numerical simulation. Auger depth profiling was used to investigate Ga⁺ ion implantation into the PLZT epilayer during FIB processing. The measurements suggest that such implantation of Ga⁺ is confined to the uppermost ~50 nm of the sample surface.

To study the photonic-crystal fiber applied in the chemical sensor, the photonic-crystal fiber was used as transmission medium. With Sol-Gel method, we selective coated thin film containing fluorescent probe in the photonic-crystal fiber core, then attained an excellent photonic-crystal fiber acetylcholinesterase sensor. The sensor could be applied in biological / chemical research, clinical medicine, environmental protection, food inspection, biochemical preventive war field and so on. In organophosphorus pesticide residue testing, the experimental results indicated that the linear measurement range could arrive to 1×10^-9~ 1×10^-3 mol/L, moreover the detection limit is 1×10^-10 mol/L.

This paper provides an analysis of the influence of a range of factors on the resolution of the ratiometric wavelength measurement system including the slope of the edge filter, the spectral nature of the input optical signal and the working wavelength range. Our investigations show that, for a given input optical signal and when the working wavelength range is known, it is relatively straightforward to select an optimum slope for the edge filter that will yield a maximum resolution for the system.

Ozone layer intensively absorbs 240nm to 285 nm incidence, when the sunshine goes through stratospheric. There is almost no UVC (200nm-280nm) band radiation existing below stratospheric. Because the radiation target presents a strong contrast between atmosphere and background, solar-blind band radiation is very useful. Wide band gap materials, especially III-V nitride materials, have attracted extensive interest. The direct band gap of GaN and A1N is 3.4 and 6.2 eV, respectively. Since they are miscible with each other and form a complete series of AlGaN alloys, AlGaN has direct band gaps from 3.4 to 6.2 eV, corresponding to cutoff wavelengths from 365 to 200 nm. A back-illuminated hybrid FPA has been developed by Shanghai Institute of Technical Physics Chinese Academy of Science. This paper reports the performance of the 128x128 solar-blind AlGaN UV Focal Plane Arrays (FPAs). More and more a CTIA (capacitivetransimpedance) readout circuit architecture has been proven to be well suited for AlGaN detectors arrays. The bared readout circuit was first tested to find out optimal analog reference voltage. Second, this ROIC was tested in a standard 20-pin shielded dewar at 115 K to 330K. Then, a new test system was set up to obtain test UV FPA noise, swing voltage, data valid time, operating speed, dynamic range, UV response etc. The results show that 128x128 back-illuminated AlGaN PIN detector SNR is as high as 74db at the speed of above30 frame per second. Also, some noise test method is mentioned.

A wavelength demodulation algorithm in smart clothes for detecting human body temperature is proposed based on the fiber Bragg grating (FBG) sensor interrogation technology. The driven voltage corresponding to peak wavelength of reference spectrum can be calculated by the method of windowing to FBG reflected wave and weighted averaging to the data. The characteristic conic of F-P filter is attained by the least square fitting. Experimental result shows that the algorithm can solve the problem of low detecting precision due to the low resolution of scanning voltage. The correlative linearity of temperature and driven voltage of F-P is 0.998, and a resolution of 0.2^oC temperature can be obtained.

According to integral imaging mechanisms, the spatial distortion of 3D integral image is affected by many parameters related to both the capture and the display setups, such as the shift and overlapping of elemental images, the aperture difference of the lens array between the capture and the display systems, the pitch between the adjacent lenses in the capture or display lens arrays. To solve this problem, we first clarify the effects of the optical parameter mismatch in pickup and display stage. An analytical model for the spatial distortion of 3D integral image caused by aberrations of the elemental images is then derived by the use of wave optics theories. Simulation results show that a 3D image is separated by local positional errors, and the reconstructed image is shifted in the depth direction. Moreover, the integrated 3D image has different magnification factors at longitudinal and lateral direction. Finally, we discuss the possibility to reduce the distortion of integral image through some methods proposed by previous researchers.

Nowadays the Gate-Ban Controlling System mainly uses the MCU as the control center, but the MCU has some disadvantages such as lower reliability and less expandability. Aims at resolving these problems, analyzes the modules' construction and designs the hardware platform and software platform of the system, develops the video collection functions at the supervising terminal based on Linux system, uses ARM as the control center and gets the information from extended ports by ARM control panel, and then transports them in SMS by using GPRS platform, at last the wireless long-distance supervise and control can be achieved. In the experiment the results show that the method proposed in this paper has good reliability and expansibility.

Much attention has been paid to the semiconductor-metal phase transition in vanadium dioxide nanomaterials, accompanied with an abrupt change in its resistivity and near-infrared transmission. The phase transition and optical properties of vanadium dioxide nanoparticles were studied by the mathematical model based on the complex refractive changing with the temperature and wavelength. The optical properties of nano-array were investigated by using the discrete dipole approximation and Mie scattering theory, as well as the absorption and scattering properties of small particles. The results show that the main contribution to the optical response with variational wavelength in the infrared is from absorption cross section comparing with the scattering cross section. It is obvious that the absorption peak of metal phase occurs near 980nm. With the change of temperature, the variation of extinction coefficient is larger in the infrared region than in the visible region. The largest change of extinction coefficient occurs in the near-infrared region. The extincition coefficient is very small in the visible region and there is a maximal value in the infrared region in the nano-array.

Steady organic-inorganic perovskite hybrids with [H₂2-AMP]_3/2Fe(CN)₆, [H₂3-AMP]_3/2Fe(CN)₆ and [H₂4- AMP]_3/2Fe(CN)₆ (AMP = aminomethylpyridine) were formed in the air. Each structure shows an unusual layered organic-inorganic structural type. The hybrids enveloped in paraffin, respectively, to prepare hybrid paste electrode (HPE) (HPE-2 with [H₂2-AMP]_3/2Fe(CN)₆, HPE-3 with [H₂3-AMP]_3/2Fe(CN)₆, HPE-4 with [H₂4-AMP]_3/2Fe(CN)₆). Three hybrids in HPEs showed good electrochemical characteristics. The sequence of redox activity is [H₂4- AMP]_3/2Fe(CN)₆ > [H₂2-AMP]_3/2Fe(CN)₆ > [H₂3-AMP]_3/2Fe(CN)₆ and that of electrocatalytical characteristics is [H₂3- AMP]_3/2Fe(CN)₆ > [H₂2-AMP]_3/2Fe(CN)₆ > [H₂4-AMP]_3/2 Fe(CN)₆. Three hybrids have been employed to investigate the interaction between DNA and three hybrids. The results indicate that between [H₂3-AMP]_3/2Fe(CN)₆ and DNA is useful and [H₂3-AMP]_3/2Fe(CN)₆ can detect the hybridization of DNA. And the interaction between [H₂2-AMP]_3/2Fe(CN)₆ and DNA and between [H₂4-AMP]_3/2Fe(CN)₆ and DNA is slender. Three HPEs display remarkable electrochemical sensitivity and stability. The variation coefficients (RSD) of repeatedly successive and interval assays are less than 2.5%. The chemical and physical stability of three hybrids is satisfactory.

A multimode fiber-loop ring-down spectroscopy for strain measurement is presented. With this technique, strain measurement is achieved in a time domain by measuring the ring-down time. The prototype of the sensor consists of a pulsed VCSEL laser diode, two multimode fiber couplers, a section of multimode fiber loop, photodetector, data acquisition card and signal processing. Experimental results show that the ring-down time has a good linear response to strain in the range from 534.2με to 1013.7με and the strain resolution is as small as 0.338με.

In this paper, we report that Mg-doped ZnO nanowires were synthesized on ITO substrate by electrodeposition using a mixture of an aqueous solution of zinc acetate, hexamethylenetetramine, and magnesium acetate for the first time. SEM, EDS and XRD were used to investigate the structural properties and chemical composition. and PL spectrum was measured for optical characterism. Compared with undoped ZnO nanowires, the band edge emission shifts from 380 nm to 375 nm.

The ring resonator is the core sensing element in the resonant integration optical gyroscope (IOG) . Its performances influence the minimum resolution and the error items of gyroscope directly and it is the key of the design and manufacturing. This paper presents optimal design of ring resonator composed of Ge02 -doped silica waveguides fabricated on silicon substrates using wide angle beam propagation method (WA-BPM). The characteristic of the light propagating across the ring resonator is analyzed. According to the design results, we succeed in fabricating the ring resonator by Plasma Enhanced Chemical Vapor Deposition (PECVD) method and Reactive Ion Etching (RIE) technology. In order to characterize the ring resonator, an optical measurement setup is built, fiber laser line-width is 50 kHz, detector responsibility is 0.95A/W and integral time is 10s. By testing, propagation loss and total loss of ring resonator are 0.02dB/cm and 0.1dB/circuit respectively. Observed from the resonance curve, a finesse of 12.5.

The Debye characteristic temperature is a useful parameter of nanodiamond thin films. In this paper, the Debye characteristic temperature of diamond thin films is studied through X-ray diffraction intensity at a fixed temperature. From x-ray diffraction, we can get the average crystallite size of diamond thin film. By the method of Xueshan Lu and Jingkui Liang, the Debye-Waller factor and Debye temperature are calculated, they are B=0.010937 nm² and Θ_D=527.95K, the Debye temperature is about one-fourth of the Debye characteristic temperature of the bulk diamond single crystal (about 2200K). The relationship between crystal size and Debye characteristic temperature is also discussed. The Debye characteristic temperature depends on particle size. When the diamond changes from bulk diamond to diamond films, the crystal size of diamond becomes smaller, so the Debye characteristic temperature becomes lower. This means that the atom binding force becomes weak, and it can increase the activity of nanodiamond thin films.

As a critical optoelectronics component of adaptive optics, the deformable mirrors (DM) is concerned by more and more researchers and has been developed even faster in recent years. In order to obtain the high mirror accuracy and image quality, it is very significant for the deformable mirror to design the best support structure with high dynamic stiffness. This paper discusses the DM support structure's mechanical principle and carries out optimal design based on the finite element analysis. Three kinds of DM support structures with different sections are selected to analyze their resonate frequencies. After determining the support structure with larger mode frequency among them, an optimal design solution has been introduced to determine a group of reasonable structure parameters which improve the resonate frequency of the supporting structure. Finally, the random response, harmonic response analysis and fatigue lifetime analysis of the support structure are implemented to confirm the effect of the optimal design, and provide basis for the design of subassembly structure of the deformable mirrors.

We have designed an intensity-demodulated sensing system based on Fabry-Perot interferometric sensor for pressure measurement. The structure of the sensing probe has been presented. The sensing system is interrogated by broadband source. For compensating drift of the source power and fluctuation in fiber attenuation, the light beam is separated into two channels by a fiber Bragg Grating, the transmitted light used as reference signal and the reflected light used as sensing signal. In order to improve the signal-to-noise ratio(SNR) of the detection system, the input light is modulated by pulse signal, and the low noise preamplifier is given. The more important factor to improve the SNR is that a synchronization integrator is employed to construct a narrow band filter to restrain noises and disturbances. It has better performance with a narrow band noise filter rather than the general RC active bandpass filter. The sensing signal and the reference signal are transformed into DC voltage signal from AC voltage signal after they passed the synchronization integrator circuit. Subsequently the division operation of the sensing signal and the reference signal is implemented. At last a linear output model is established. The system has advantages of fast response, strong ability and low cost. The dynamic range of the sensor is from 0 to 400KPa, and the resolution reaches to 200Pa.

A micro acoustic sensor with inclined fibers was proposed to improve its sensitivity. In order to get the highest sensitivity within the micro structure, the relative positions of elements in sensor should be exactly located; especially the distance between fibers and membrane should be optimum. A packaging technology for this micro sensor assemblage and test is introduced. It is based on a packaging system composed of three parts: distance adjusting, intensity collection and data analysis. The distance adjusting part increases the operating distance with a step of 2μm. Meanwhile the received power is recorded by intensity collection part on line to get the intensity characteristic curve. Through the data analysis part, sensitivity curve, optimum operating distance, the highest sensitivity and optimum received power of the proposed acoustic sensor are got. An experiment was implemented to assemble and test a sensor whose angle between two fibers was 60° by the proposed packaging system. Its optimum operating distance and highest sensitivity were analyzed to be 30μm and 2.49μW/μm. The sensitivity of packaged sensor to standard acoustic signal is 16mV/Pa and SNR is tested to be 54dB.

In this paper, we report the ohmic contact to n-GaN fabricated by implanting silicon into Mg-doped GaN using an alloy of Ti/Al/Ti/Au metallization. The used materials were grown on (001) sapphire substrates by metal-organic chemical-vapor deposition (MOCVD). The layer structure was comprised of a GaN buffer layer and followed by a 2 μm thickness Mg-doped GaN (N_a=5×10¹⁷cm^-3) and then double silicon implantation was performed in order to convert p-type GaN into n-type GaN films. The as-implanted samples were then thermal annealed at 1150 °C for 5 min in N₂ ambient. The carrier concentration and Hall mobility were 3.13×10¹⁸ cm³ and 112 cm²/ (V·s) measured by Hall method. Multilayer electrode of Ti (50 nm)/Al (50 nm)/Ti (30 nm)/Au (30 nm) was deposited on n-GaN using an electron-beam evaporation and contacts were formed by a N₂ annealing technique ranging from 600 to 900 °C. After annealing lower than 700 °C, the contacts exhibited a rectifying behavior and became ohmic contact only after high temperature processes (≥700 °C). Specific contact resistance was as low as 9.58×10^-4 Ω·cm² after annealing at 800 °C for 60 seconds. While annealing temperature is higher than 800 °C, the specific contact resistance becomes worse. This phenomenon is caused by the surface morphology degradation.

This paper presents a low-power low-noise wide-dynamic-range GaN-based UV detector with pixel-level A/D conversion. The detector comprised an array of 50×50μm² pixels with a multi-channel bit serial (MCBS) ADC in each pixel. Each pixel contains a UV photo-detector, a 1-bit comparator and a 3-T memory cell. The A/D conversion is performed simultaneously for all pixels. The digital data is read out from the pixel array in manner of a random access digital memory. Since there are many ADCs operating simultaneously, power consumption for each ADC must be minimized. To satisfy the low power consumption, A power-down circuit is introduced in. The minimal value for ADC resolution and the frame rate are 10bits and 100f/s respectively. A high GBW comparator is designed to satisfy this demand. In order to suppress the FPN and 1/f noise a digital correlated double sampling (CDS) is adopted in this application.

The design of liquid crystal cell is an important factor to determine the display quality of LCoS display device. The goal of this paper is to gain VGA field sequential color (FSC) LCoS device used for near-to-eye system. The characteristics of optics and electrooptics for the twist nematic liquid crystal material and the material requirements of the FSC LCoS were studied. The LCOS liquid crystal cell optimized by dynamic parameter space method had an uniform reflectivity (about 90%) for the light with wave length from 450nm to 650nm. Both considering the electrooptic response curve of liquid crystal and the relationship between the contrast ratio and pixel size, we determined to use high speed twist nematic liquid crystal working in normally white mode. The liquid crystal cell gap and the pixel size were determined as 2.5um and 12um, respectively. The VGA FSC LCoS device was fabricated with SMIC 0.35um CMOS process and filled with LC-A liquid crystal of Merck in Varitronix. The measurement showed that the response time of liquid crystal from light to dark was 1.8ms and from dark to light was 4.4ms. The contrast ratio is bigger than 50:1. The LCoS displays well.

GaN-based avalanche photodiodes (APDs) have become of increased interest in the UV detection arenas. However, numerous material-, fabrication-, and design-related problems are exactly settled before GaN-based APDs can be commercialized. In this study, we, first, discussed recent development of the GaN-based APDs. Then front- and back-illumination (respectively realizing electron and hole initial impact-ionization) p-i-n heterostructure devices with various mesa diameters were fabricated. The device with a diameter of 40 μm exhibited a multiplication gain of ~680, at reverse bias of ~76 V corresponding to the magnitude of the electric field of ~ 3 MV/cm by experiment indicating and simulation verifying. To confirm the origin of dark current under different reverse bias, the dark current-voltage characteristic of various sized mesa devices were performed. The dark current could be linearly fitted to the device diameter (or circumference) implied that the surface leakage along the mesa sidewall was the dominant component of the dark current. At zero bias, the spectral peak responsivity reached ~ 0.14A/W for front illumination, and ~ 0.152A/W for back illumination at a wavelength of 358 nm. The positive breakdown voltage coefficient from the temperature-dependent current-voltage characteristics was 0.02 V/K.

Vertically oriented, highly ordered TiO₂ nanotube arrays have attracted considerable attention because of their impressive competence in a variety of applications including solar cells, chemical sensing, photocatalysis and biomedical industry. However, only a few papers reported on the solar cells prepared by combining TiO₂ nanotubes and semiconductor quantum dots (QDs) based on composite structures. This paper presents the preparation of TiO₂ nanotube arrays for the solar cells based on TiO₂ nanotubes and CdSe QDs. The fabrication routes of highly organized TiO₂ nanotube arrays synthesized by anodization of Ti foil in electrolyte were described, the performance of TiO₂ nanotube arrays on the CdSe QDs sensitized TiO₂ nanotube arrays photoelectrodes was investigated, too. The work herein details the effect of fabrication variables anodization time and examines the crystalline nature of the annealed (initially amorphous) samples. The nanotubes have an average inner diameter of 50 nm and a tube thickness of 12 nm. The maximum length of the TiO₂ Nanotube we achieved is 9.75 μm. In QDs-sensitized TiO₂ nanotube solar cells, CdSe QDs were used as the antenna layer (an absorber material) coating on the surface of titanium foil. Application of nanotube arrays to quantum dot solar cells under sunlight is discussed and compare to the dye sensitized solar cell. The quantum dots (QDs) sensitized solar cell's efficiencies can not match dye sensitized solar cell, but it will be a novel way to utilize solar energy in the future.

Copper nitride thin films were deposited on glass substrates by reactive DC (direct current) magnetron sputtering with 0.8Pa N₂-gas partial pressure (the total pressure was 1Pa), 100°C substrate temperature and different DC powers. X-ray diffraction measurements show that the films are composed of Cu₃N crystallites with anti-ReO₃ structure and exhibit preferential orientation to the [111] direction. The intensity of the preferred crystalline orientation of the films increased with DC power. It is found that the DC power not only affects the crystal structure of the Cu₃N films but also affects its resistivity. The resistivity of Cu₃N films decreased sharply with increasing of the DC power, reaching a value 1.33Ωcm. From this work, it is concluded that the optimum DC sputtering power for producing high-quality and well [111]-oriented Cu₃N films on glass substrates is 80W, with 0.8Pa N₂-gas partial pressure and 100⁰C substrate temperature.

ZnO:Al (AZO) films have potential applications in ultraviolet detecting devices. The structural and optical properties of the AZO films are presented. Highly c axis oriented wurtzite phase AZO films are prepared on quartz substrate by rf sputtering method. The optical constants and the thickness of the AZO films are determined by fitting the measured transmission spectra with Tauc-Lorentz (TL) model. The refractive index n increases as the photon energy increases, and reaches the maximum of 2.50 at 3.66 eV, beyond which the refractive index n decreases with further increasing of photon energy. The peak of the refractive index n corresponds to the optical band gap of the AZO films, which is associated with interband transition between the valence and conduction bands. The extinction coefficient k also increases with the enhancement of the photon energy, and a strong absorption peak with maximum of 1.10 is prominent. The absorption peak due to an electronic transition accords with the peak transition energy E₀ (3.79 eV) is obtained by TL model. The energy E₀ of this model corresponds to the Penn gap, where the strong absorption of the material took place. By fitting the absorption coefficient, the optical band gap 3.62 eV of the film is evaluated. Based on the Tauc's power law, the optical band gap of the films is proved as a direct interband transition between the valence and conduction bands. This enhanced band gap compared with ZnO (3.37 eV) correlates to the Burstein-Moss band filling effect due to Al doping.

In the present study, high quality rubrene thin film is fabricated through control of growth time with thermally evaporation under vacuum. Optical microscopy is employed to analyze the surface morphology of the samples. A mode of thin film growth from an amorphous continuous film to polycrystalline rubrene thin film could be controlled by growth time. Images of such structures [acquired using optical microscopy] show that they are polycrystalline structure, which splays out from a central point. Rubrene thin film is linear structure when the growth time is greater than 7 hours. Meanwhile, the optical constant (absorption coefficient (α)) is analyzed by transmission and absorption spectrum. The optical band gap (Eg) is deduced by Tauc formula. From the ultraviolet absorption spectrum of rubrene thin film, we observe two shape peaks, which can be explained by Davydov splitting (factor-group splitting).

Silicon is a kind of excellent semiconductor material and is one of the core material of microelectronics. But it is not a fine luminescent material. The photoluminescence(PL) will be obtained by excitation only when the size of silicon partials reduced to a certain value. Nanocrystalline silicon films have special structure and many excellent optoelectronic properties and are supposed to be applied in optoelectronic devices and large scale integrated circuits. In this paper, Nanocrystalline silicon films was deposited on silicon substrate by RF magnetron sputtering with pure Si target. And the working gas is the mixture of oxygen and argon .The content of O₂ in working gas (O₂/ O₂ + Ar) and the power of sputtering were changed separately .However, the substrate temperature, working gas pressure and other conditions were definite. After annealing in the stove, we got the Nanocrystalline silicon particles in the thin films. Fourier transform infrared(FTIR) transmittance measurement was carried out to characterized Nanocrystalline silicon films. X-ray photoelectron spectroscopy (XPS) measurement was also performed to estimate the atom ratio of the Nanocrystalline silicon films. Raman scattering measurements was also taken in to characterize the Nanocrystalline silicon films. The formation of Nanocrystalline silicon filmswere depended partly on the parameters of experiment. The annealed silicon films were researched that the size of the Nanocrystalline silicon particles proved to be largely impacted by the annealing temperature in the thin film

(1-x)Pb(Zn_1/3Nb_2/3)O_3-xPbTiO₃ nano-grade films were produced by using both an normally liquid phase epitaxy and an improved vertically dipping liquid phase epitaxy system developed by ourselves. Utilizing a specially heating device, the improved liquid phase epitaxy system can offer a controllable time-lag before the melt adhered on the bottom of the substrate crystallized into film. In the time-lag moment, the force of the rolling substrate driven by the rolling seed role would throw out some melt adhered on the bottom of the substrate and reduce the quantity of the melt. And the surface of the film can be smoothed. By adjusting the quality of the melt left on the bottom of the substrate, nanograde thin films of (1-x)Pb(Zn_1/3Nb_2/3)O_3-xPbTiO₃ were grown up on the substrates of SrTiO₃ (001). The morphology of the both films produced by normal LPE method and our improved LPE method were investigated by OM. The results show that the films produced by using this improved LPE method have uniform morphology without powders adhered in it. The farther investigation of the morphology of the PZNT film produced by our improved LPE method was done by using AFM show that the grains of the films have column-shaped morphology with similar size. For the films produced by using normal LPE method, the farther investigation of their morphology were done by SEM method. The results show that there are square-shaped grains with different size for the grains of the film, and there are many stuff material in the space among the grains. The study of XRD reveals that the films produced by using both normal LPE method and improved method had good alignment on the SrTiO₃ (001) substrate.

Mn_1.56Co_0.96Ni_0.48O₄ films with spinel structure for infrared detection are prepared on Al2O₃ substrate by chemical solution deposition method. The resistance vs temperature (R-T) characteristics at 130~304 K temperature range and infrared transmission spectrum (1-10 μm) are measured and temperature coefficients of resistance (TCR) are calculated. The conduction process can be explained well by hopping conduction. At low temperature nearest neighbor hopping (NNH) mechanism fits the data well, while at high temperature, variable range hopping (VRH) mechanism dominates the system, and this transition temperature is at about 200 K. The value of TCR is about -3.73% K^-1 at 300 K. Mn_1.56Co_0.96Ni_0.48O₄ films exhibit a strong absorption around 2μm which is considered to be corresponding to the gap of energy bands showed by infrared transmission spectrum. The band gap obtained from the transmission spectrum data using the Tauc's law is ~0.567 eV.

Along with the development of seismic exploration, the demand of frequency, dynamic range, precision and resolution ration is increased. However, the traditional geophone has disadvantages of narrower bandwidth, lower dynamic range and resolution, and cannot meet the new needs of seismic exploration. Geophone technology is a choke point, which constrains the development of petroleum prospecting in recent years. Fiber Bragg Grating seism demodulation technology is the newest kind of seism demodulation technology. The sensing probe of the Fiber Bragg Grating geophone is made up of Fiber Bragg Gating. The information which it collects is embodied by wavelength. The modulation-demodulation is accomplished by Fiber Bragg Gating geophone directly. In this paper, we design different size Fiber Bragg Grating geophones based on the transmission properties of Fiber Bragg Grating and cantilever beam method. Beryllium bronze and stainless steel are chosen as the elastic beam and shell materials, respectively. The parameters such as response function and sensitivity are given theoretically. In addition, we have simulated the transmission characteristics of Fiber Bragg Grating geophone by virtue of finite element analysis. The influences of wavelength, mass block, fiber length on the characteristics of geophones are discussed in detail, and finally the appropriate structural parameters are presented.

Vanadium thin films were deposited on silicon nitride substrates by direct current facing targets magnetron sputtering, and then were annealed in room air ambient to form the vanadium oxide(VO_x) thin films. The VO_x thin films made by this way have high TCR(Temperature Coefficient of Resistance) near room temperature. Compared with reactive sputtering^[1,2], the metal-oxygenation method needs fewer preparative parameters which are very easy to control. The main target of this paper is to study the electrical property of the VO_x thin films, especially the relationship between the TCR of VO_x thin films and their preparative parameters. Orthogonal experiment was used to choose optimal preparative parameters, which include sputtering pressure, sputtering time, annealing time and annealing temperature. Then the resistance-temperature property was measured, and the results show that the VO_x thin film which was prepared after sputtered at 1.5 Pa for 20 minutes at room temperature and annealed at 400°C for 1.5h has the best resistance-temperature property. And near room temperature, its TCR is -3.25%/K, which is twice as much as that of metal material. And the VO_x thin film has potential application in uncooled infrared microbolometer^[3~5].

Vanadium dioxide (VO₂) thin films, for their property of metal-insulator transition (MIT), have drawn many researchers' attention on optical devices study. Nowadays it is complicated to fabricate single-phase VO₂) thin films. Ion beam sputtering is adopted to deposit VOx thin films (main component is VO₂) ) on Si₃N₄, while sputtering power, substrate temperature and partial oxygen pressure of VOx are adjusted. Then annealing technology is utilized to improve the parameter property of VO_x thin films. The thin films are tested by AFM, XPS, XRD, Fourier transform infrared spectrometry, tunable semiconductor laser and optical power meter. Both temperature-driven phasetransition and photoexcitation phasetransition of VO_x thin films are applied. The samples are heated from 20°C to 80°C, discovering that the phasetransition temperature is about 59°C and the value of resistance before the phasetransition is two orders of magnitude over the value of resistance after the phasetransition. At the wavelength of 1550 nm, the transmission is from 32% to 1%. Besides, the extinction ratio of the thin films sample is obtained. The optical properties show that the VO_x thin films have an apparent switching effect in the optical communication fields.

Sensitivity field in electrical resistance tomography system is affected by the distribution of multiphase medium, and the data of sensitivity distribution which are obtained by theoretical calculation can be used as prior experimental knowledge for image reconstruction, so it is necessary to analyze the distribution of the sensitivity field to decrease error of soft field and improve the quality of the image reconstruction. In this paper at the basis of analyzing the principle of electrical resistance tomography system, the mathematical model of sensitivity field is built by utilizing finite element method. Through study field with disperse phase, the factors affecting the distribution of the sensitivity field and rules are analyzed, the calculation of sensitivity distribution and visualized simulation are achieved The experiments show that the finite element model is right, the sensitivity field proposed is in accordance with the practice and the computation velocity is about 10seconds, which provides the basis for related image reconstruction algorithms.

The pharmaceutical and fine chemicals industries are strongly concerned with the manufacture of high value-added speciality products, often in solid form. On-line measurement of solid particle size is vital for reliable control of product properties. The established techniques, such as laser diffraction or spectral extinction, require dilution of the process suspension when measuring from typical manufacturing streams because of their high concentration. Dilution to facilitate measurement can result in changes of both size and form of particles, especially during production processes such as crystallisation. In spectral extinction, the degree of light scattering and absorption by a suspension is measured. However, for concentrated suspensions the interpretation of light extinction measurements is difficult because of multiple scattering and inter-particle interaction effects and at higher concentrations extinction is essentially total so the technique can no longer be applied. At the same time, scattering by a dispersion also causes a change of phase which affects the real component of the suspension's effective refractive index which is a function of particle size and particle and dispersant refractive indices. In this work, a novel prototype instrument has been developed to measure particle size distribution in concentrated suspensions in-process by measuring suspension refractive index at incidence angles near the onset of total internal reflection. Using this technique, the light beam does not pass through the suspension being measured so suspension turbidity does not impair the measurement.

The growth parameters affecting the deposition of InGaSb quantum dots (QDs) on GaAs substrate by molecular beam epitaxy (MBE) were reported. The InGaSb were achieved using lower growth temperature and optimized growth interruption, which is important to obtain high-quality materials Photoluminescence (PL) measurements show the good optical quality of InGaSb QDs. At room temperature, the wavelength of PL spectrum and full-width at half-maximum (FWHM) are around 1.3 m and 106 meV, respectively.

In this work, rutile Sn-doped TiO₂ nanocrystals are synthesized by hydrothermal method, with TiCl₄ and SnCl₄ aqueous solutions serve as the precursors. When the TiCl₄ and SnCl₄·5H₂O serve as precursors with ratio of Ti⁴⁺/Sn⁴⁺ 4:1, most of the Synthesized crystals are square morphology, with diameter of 30nm. When the ratio of Ti⁴⁺/Sn⁴⁺ changed to about 1:1, the obtained samples display various kinds of morphology. Some of them are tiny square crystals with the size less than 20nm. The bigger ones is about 100-120nm in length and 30-50nm in diameter. And the aspect ratio is about 3:1. When the ratio of Ti⁴⁺/Sn⁴⁺ is 0:1, the crystals is 20nm in diameter, and 30-120nm in length. The results indicate that combination of Ti⁴⁺ and Sn⁴⁺ has relative evident effect on the crystals morphology. The component of the obtained samples has been analyzed by X-ray energy dispersive spectroscopy (EDS). The result shows that the highest atomic percent concentration of the doped-Sn is very low. The experiments results indicate that it is hard for other metal ions to dope into the rutile TiO₂ by the way of lattice-substitute.

As one of widely used microlens fabrication techniques, thermal reflow method has many advantages such as simple fabrication process, low price, and good smoothness of the microlens. However, it is difficult to predict and control the final microlens contour after melting process. In this paper, we pay our attention on searching a method to control the microlens contour. The relationship between microlens contour and developing time is studied by experiments in the case of insufficient developing. When the developing time is not sufficient, some of the photoresist will be left on the substrate. In that case, the contact angle of microlens, which decided by the ratio of microlens aperture on its curvature radius, is smaller comparing with the case of completely development. The experimental results indicate that different developing time will result in different contact angle of the microlens after the melting process. Therefore, it is enables to control microlens contour by adjusting developing time. The experimental results also indicate that the degree of microlens contour deviate from ideal spherical is related to developing time. These results are valuable for us to fabricate the microlens which has expected geometrical shape.

This article illuminates a kind of sensor used in measuring the concentrations of the main pollutants in flue gas streams (Dust, SO₂ and NO_x) based on the UV-DOAS technology in air pollutant monitoring. Using the high-level embedded microprocessors and complex programmable logic device, the sensor completes system measurement, management and signal communication, and spectrum inversion and data saving are processed by PC at the same time. Differential optical absorption spectroscopy (DOAS) technology is used in the flue gas pollutant factor analysis through the sensor construction. The absorption spectra of SO₂, NO_x and smoke dust are inverted to reduce the interference of other factors in flue gas streams. At the same time, the effect of light source fluctuation and optical transmission ratio is considered and removed in the measurement system. The result shows that the monitoring accuracy of concentration of sulfur dioxide and smoke dust achieves ±2%, the concentration of nitrogen oxides accuracy achieves ±3%, which meets the requirements of the national standard. The sensor can be directly installed in a flue. As a result, process of measuring is simplified and measurement accuracy is improved. Further more, this method increases the stability of the system and reduces the maintenance costs. Measurement data is transferred through data bus between the sensor and upper PC to realize remote control and real-time measurement. Considering the severe conditions in measuring the main pollutants in flue gas streams, applications of anti-interference and anti-corrosion etc. are taken in the system design.

With the development of the laser technology, electronic technology, as well as computer technology, the traditional laser power measurement couldn't meet the demand. We design a new type of laser power measurement for the high power and intelligent measuring: compared with the traditional one-sensor laser power measurements, we select three different kinds of sensors which are the thermocouple, photoelectric cell and flow meter to get multi-signals. We use the thermocouple and flow meter in order to calculate the power of the laser, and photoelectric cell is used to depict the waveform of the laser pulse. The processing system is based on the AVR embedded system which includes signal sampling, data storage, algorithmic processing and both the waveform and the numerical results displaying, meanwhile the system connects and uploads the data to the computer, finally realizes the functions of data processing and saving for the further research. During the working time of the laser, the system can monitor the power and energy in real time; calculate the results of the power, energy and other significant parameters, show the waveform as well. The figures of the system are that substituting the metal senor for the flow water sensor which realizes the higher power and energy measurements; using multi-channel sensors that get the power, energy and waveform results; introducing the AVR processor which ensure high speed processing and the reliability of the system. The real-time algorithm makes the A/D sampling of the three-channel sensors in time, and the integral compensation algorithm makes the results more precise. The last, the method of "inner loop" and "outer circle" meet the different demand of the measurement which makes you have more choices. In practice, due to the interference, we also put efforts to solve the interference of the power supply and the electro-magnetic interference (EMI).

Microstructural, optical and electrical properties of Sc-doped ZnO films grown by RF magnetron sputtering at room temperature were investigated. The deposition pressure was varied from 0.3 to 2.0 Pa. XRD spectra indicated that the (100) peak of the film weakened as the reaction pressure decreased and the (110) peak strengthened at a preferred pressure, 0.3Pa. Compare with (100) and (110) peaks, the intensity of (002) peak was relative weak. The strain in the film was investigated. The average transmittance of these films was above 90% in the wavelength range from 400 to 800 nm, while decreased in short wavelength region due to the light scattering. More significantly, various optical band gap of the films were found correspond with different pressure. The causation might be due to the Burstein-Moss effect.

In this paper, we report on a MOS-like structured Si photodetector whose response range covers UV-VIS-NIR with good responsivity. The devices have an Al/Silicon-Rich Oxide (SRO)/Si MOS-like structure fabricated with standard Si IC technology. Its reverse leakage current is as small as 10^-10 A at V= -5 V. However, when illuminated with white or UV light with intensity of ~3.6 mW/cm², the reverse current increase greatly. The photocurrent to dark current ratio can be as high as 1.5×105 for white light and 8.7×10⁴ for UV light at V= -5 V, indicating that the structure is very sensitive to both visible and UV light. The spectral response of the device shows good responsivity from 200 nm to near infrared, with maximum responsivity of 0.78 A/W at 900 nm. The role of the SRO layer and the Si substrate in obtaining such a high photoresponse in UV-VIS-NIR range was analyzed.

Basing on the principle of reflective displacement fibre-optic sensor, a high accuracy non-touch on-line optical fibre sensor for detecting roll shape is presented. The principle and composition of the detection system and the operation process are expatiated also. By using a novel probe of three optical fibres in equal transverse space, the effects of fluctuations in the light source, reflective changing of target surface and the intensity losses in the fibre lines are automatically compensated. Meantime, an optical fibre sensor model of correcting static error based on BP artificial neural network (ANN) is set up. Also by using interpolation method and value filtering to process the signals, effectively reduce the influence of random noise and the vibration of the roll bearing. So the accuracy and resolution were enhanced remarkably. Experiment proves that the resolution is 1μm and the precision can reach to 0.1%. So the system reaches to the demand of practical production process.

Vibration monitoring is one of important technology means for large electromechanical equipment's safety-alert and malfunction-diagnosis, and also a hot problem studied for a long time at home and abroad. Vibration sensor is key part for the technology means, but traditional electromagnetic vibration sensors are restricted for use in the field due to their weak competence to anti-electromagnetic interference. It is inevitable and imminent to develop novel type of vibration sensors instead of them. Aiming at the above-mentioned demand, the authors in the paper fabricate a push-pull type of chirped fiber Bragg grating (CFBG) vibration sensor based on matching demodulation. The authors, at first, set up mechanical model of the sensor, then analyze the principle of CFBG matching demodulation and get the relation between acceleration and output voltage at last. The sensor has such functions as anti-electromagnetic interference, temperature self-compensation and combining vibration sensing and dynamic wavelength demodulation. Moreover, some experiments are done to study its sensing properties and the results indicate that its sensitivity is 369mv/g, linearity degree is over 99.9%, repeatability is superior to 2%, measurement bandwidth is from 10Hz to 400Hz, acceleration measurement range is 8g, and the minimal cross-axis anti-interference is 30dB. To sum up, the sensor is competently used for monitoring the vibration of large electromechanical equipment.

This paper is based on the principle of Faraday Effect, and the experiment verified the Magneto-Optical Rotation Enhanced (MORE) effect of the magneto-optical rotation reflector cavity. The experiment is operated on the Direct Current Magneto-optical Modulator, and uses the Terbium Glass as magneto-optical media. The "Part Reflector Cavity" composes of the total reflection mirror on one side of the magneto-optical media, and the part reflection mirror on the other. We get three groups of data of the deflection angle and the relative detected light intensity under three conditions: 1. The light passes the media once (general extinction method); 2. The reflectivity of the part reflector cavity R=7.1%; 3. The reflectivity of the part reflector cavity R=25%. By comparison, the experimental data are mostly consistent with the theoretical curve. So the experiment verified the MORE effect of the magneto-optical rotation reflector cavity.

A novel device of dual-tuner variable-focus microlens consisting of three kinds of liquid is put forward in this paper, whose basic structure includes a core chip sandwiched between two glass covers. The core chip is made from electric conductor to simplify the device design and the fabrication technics. The lens materials consist of three kinds of immiscible liquids, such as first conductive liquids, insulating fluid and second conductive liquid with different refractive index. Two meniscuses between every two liquids is used as optical lenses. The two-lens focal distances are tuned by changing the curvature of these two meniscuses through the effect of electro-wetting. A new liquid microscope based on EWOD is developed on the basis of the above mentioned structure, making achromatization straightforward.

Free-standing polycrystalline diamond films with a thickness of about 200 μm were grown by microwave plasma chemical vapor deposition (MPCVD) method. Raman spectra indicated high quality diamond film of the nucleation surface. AFM result indicated the nucleation surface was quite smooth with a mean surface roughness (RMS) of about 10 nm. The sheet carrier densities and sheet resistivities of hydrogenated nucleation surfaces of diamond film under different annealing temperatures were investigated by Hall effect measurement. The sheet carrier density and sheet resistivity remained in a relatively stable range until the annealing temperature above 200 ºC, and the sheet carrier density dropped drastically and sheet resistivity rose sharply, achieving a sharp change at an annealing temperature of 250 °C. The ultra-violet Raman spectra and infrared spectra showed CHx stretching modes at the hydrogenated nucleation surface, whereas almost little hydrogen incorporation on annealed sample.

P-type hydrogenated nanocrystalline diamond (NCD) film on silicon substrate was realized by microwave plasma chemical vapor deposition (MPCVD) method followed by hydrogen plasma treatment. And then a metal-semiconductor field-effect transistor (MESFET), where ohmic contacts as source and drain were formed by depositing gold and Schottky gate contact with a gate length L_g of 10 μm was formed by depositing metal aluminium, was successfully fabricated with surface p-channel based on the above NCD film. Atomic force microscopy (AFM), scanning electron microscopy (SEM), Raman spectroscopy and Fourier-transform infrared spectroscopy (FTIR) were applied to characterize the structure and the surface morphology of the hydrogenated NCD film. The drain source current-voltage (I_DS-V_DS) characteristics showed enhancement mode operation of the surface p-channel MESFET could be obtained despite the Al gate was crossing many grain boundaries. And a maximum channel current I_DS (max) = 25.8 μA at V_GS= -2.0 V with V_DS = -10 V, were obtained.

An eight-channel distributed feedback fiber laser (DFB FL) sensor system using phase generated carrier (PGC) demodulation scheme is described in this paper. This system employs an unbalanced Michelson interferometer to convert the measurands-induced laser wavelength shifts into the phase shifts. The digital PGC algorithm is realized on the Field Programmable Gate Array (FPGA) module of the commercialized NI-Compact RIO. The influence of the time delay between the interferometric signal and the PGC carrier is then investigated. Finally, the experimental system is setup to validate the analysis above.

A mechanical model of the polymer optical fiber grating (POFBG) sensor was proposed to determine the strain transfer relationship between the POFBG sensor and the host material. The interface strain transferring mechanism was analyzed among the core of optical fiber, the cladding of optical fiber, the adhesive interlayer and the host material. Because the POFBG sensor and the adhesive interlayer are macromolecular polymer, the model of multilayer interface strain transfer was established based on the linear viscoelastic theory. The strain transfer rate (STR) and the average strain transfer rate (ASTR) were inferred. STR and ASTR of multi-layer mediums between the POFBG sensor and the host material were also analyzed in a similar way. The results show that the measured strain by the POFBG sensor is lower than the actual strain of the host material. STR is lower with steady-state response than transient response. The study provides the theoretical reference of development and engineering application of embedded POFBG sensors for health monitoring.

The sensing principle of FBG packaged was developed, and packaging technology for fiber Bragg gratings (FBGs) and the embedding technique were studied. A scheme of packaging technology using the red copper slice for FBGs was presented, and experimental results indicate that the strain sensitivity coefficient of FBG packaged is nearly the same as that of the bare FBG, and that the FBG packaged can measure the 1με change, and that the temperature sensitivity coefficient of FBG packaged is 2.97 times as much as that of the bare FBG, and that the packaging structure using red copper slice improves the temperature resolution of demodulation equipment for FBG sensors, and that the FBG packaged sensors can measure the 0.03°C change.

Base on spectral characteristics of three-layered cascaded long-period fiber gratings (LPFGS) were analyzed by the coupled-mode theory together with the transfer matrix method, the result show that their spectra have great consistency when the length of the cascading fiber is small or the cascading position is near the end of the cascaded LPFG. The long-period fiber gratings transfer transmission conductive mode in the condition of phase matching. The wavelength, phase and amplitude of same direct transmitted signal were changed by modulation of cladding refractive index. When LPFG set in the state of phase-shift long-period fiber grating, LPFG signal can be demodulated adopting different interference detection method. The transmission spectra of phase-shift long-period fiber gratings were detected by photoelectric heterodyne, and three-layered cascaded long-period fiber gratings (LPFGS) photoelectric heterodyne method demodulate the effects of the length, position of the fiber and film parameters transformation on the transmission spectrum of the cascaded LPFG. The results show that wider scope of frequency and higher resolving ratio can be achieved adopting photoelectric heterodyne detection method with LPFG setup in phase-shift long-period fiber gratings. The combination of LPFG , photoelectric heterodyne device and microwave frequency counter can solve speed and resolving ratio problem of long-period fiber gratings sensors and form cascaded long-period fiber gratings strain and gas sensors. The dual triple-clad cascaded long-period fiber gratings demodulate frequency by electronic filter and counter on the state of different sensor. The system possesses some advantage of higher resolving ratio and adapted integrated circuit and can be produced as small volume and anti-vibration photoelectrical sensor with higher heterodyne sensitivity. The distributed sensor array can be composed by LPFG with wave division multiplexing. It possesses extensive applied foreground in environment and underwater protect inspection and detection domain.

To solve some problems of silicon micro-cantilevers etching rate and quality, a new method which combines laser micromachining processes and micro-electromechanical systems (MEMS) is adopted to fabricate silicon microcantilevers. The experimental results show that the laser etching technology provides an excellent alternative approach to release silicon micro-cantilever beams from silicon substrate with low cost, high etching rate, precision of operation, and design flexibility, which avoiding convex corner undercutting in etching of micro-cantilevers. This study also provides a new method of laser etching technology for the fabrication of other microstructures.

Optical switches are important devices in optical communications. A blocking 8×8 thermo-optic waveguide switch matrix and a rearrangeable nonblocking one are designed and fabricated on silicon-on-insulator (SOI) wafer. The building block of the matrix is a 2×2 switch cell with a Mach-Zehnder interferometer(MZI) configuration, where a general multi-mode interferometer (MMI) serves as splitter/combiners. Nonblocking switch matrix presents excess loss of 10.9dB~13.6dB and crosstalk of -26.6dB~-13.5dB. Blocking one presents excess loss of 6.6dB~9.6dB and crosstalk of -25.8dB~-16.8dB. Their extinction ratios vary from 17dB to 25dB. The power consumption of each switch cell is less than 240mW.The response time is less than 3μs. The power consumption and the response times are much better than that of silica-based or polymer-based switch matrix because of the large thermo-optic coefficient and the high thermal conductivity of silicon.

Hydrogen-free Diamond-like Carbon(DLC) films onto silicon wafer are deposited by pulsed laser deposition(PLD) at a substrate temperature of 25 °C in vacuum. The laser source used was an 20 ns KrF excimer laser beam with the wavelength of 248 nm and maximum laser energy of 600 mJ at a repetition rate of 10Hz. The laser intensity used vary from 1.02×109W/cm² to 2.24×109W/cm². Infrared transittance, Raman spectroscopy and nano-hardness are used to analyze the comprehensive performance of the films, and the results show that the film deposited at laser intensity of 1.28×109W/cm² is the best among other films. This can be explained well by that the carbon ion energy at laser intensity of 1.28×109W/cm² is suitable to form sp³ bonds than sp² bonds. If carbon ion energy is too low, it has not enough energy to from sp³ bonds. While, if carbon ion energy is too high, extra energy will transfer sp³ bonds to sp² bonds. Raman spectrum measurement showed a unsymmetrical broad peak with a center at 1550 cm^-1 for all films. The ID/IG calculated by Gaussian fit of Raman spectrum is as low as 0.44. There are few graphite particles on these DLC films. The nano-hardness of DLC films is relatively high. The DLC films improve Silicon wafers' anti-scratch performance efficiently. The DLC films are scratched 100000 times under 9.8N press on RS-5600 films scratch machine, no nick is observed after scratch. The highest IR transmittance between 3 and 5μm of Silicon wafers increase 22%, from 54.5% to 66.5% after coated by DLC films, which approaches the highest IR transmittance in theory. The mean IR transmittance between 3 and 5μm of the Diamond-like Carbon films deposited at laser intensity of 1.28×109W/cm² is 65.6%.

Optical fiber interferometric (OFI) sensors have been extensively used to measure a large variety of parameters due to their superior performance. The F-P OFI sensors are very sensitive to the cavity-length changes. However, it is difficult to fix the operating position at the quadrature point (Q point) in the sensor fabrication, and the sensor may also encounter with various environmental perturbations, which may drive the sensors out of the linear region. For the purpose of developing a highly-sensitive and reliable OFI vibration sensor, a new method was proposed and demonstrated in our research. By choosing a short cavity length, we can obtain OFI sensor with large interference period, which is helpful to avoid the infection of Q point drifting, but the visibility decline problem will arise simultaneously. A tilted diaphragm method was used to solve this problem in the short cavity length. Theoretical analyses have been performed, and a tilted diaphragm optical fiber sensor has been fabricated, the result shows a visibility of nearly 100% is realized in a short cavity about 50μm.

This paper proposes, for the first time, a MEMS-based digitally tunable micromechanical resonator (DTMR). A general methodology of tuning the resonant frequency of a MEMS comb-driven resonator using digital voltages is presented. In this mechanism, a microelectromechanical digital-to-analog converter (MEMDAC) is employed as the tuning unit. The resonant frequency of the DTMR shifts in response to the input digital voltage. Several structures have been proposed, while the one using the number of the vertical beams as the scale factor features the optimum linearity. In a modified design, the resonate frequency can be tuned from approximately 65 to 94 kHz. The maximum deviation from ideal linearity can be reduced to 0.31 kHz, which is remarkably less than those of the preliminary designs.

High temperature is one of the most important parameters in the fields of scientific research and industrial production. At present, thermocouple, thermo resistive and radiance thermometer are already technologically mature which can be adopted to measure the general temperature, but when it comes to the transient high temperature that changes pretty quickly in wretched conditions, those traditional pyrometers can not meet the requirements any more. In this paper, we designed a transient optical high temperature measurement system. First, design of the temperature measurement probe. The system took blackbody cavity sensor together with optical fiber to receive the measured signal, here, the integrated emissivity model of the blackbody cavity was established and the optimum structure parameters were confirmed. Secondly, design of the entire temperature measurement system. A contact-noncontact measurement method was applied, which is to make the blackbody cavity and the measured high-temperature source contact, the fiber probe and the blackbody cavity noncontact, as a result, the error caused by contact measurement is overcame and the precision is guaranteed at the same time. In addition, a fiber grating was introduced as the wavelength filter device which can realize the dynamic filter of narrow-band signals and reduce the impact of background light. Thirdly, signal processing. In this part, we applied labVIEW software and wavelet analysis method. All of the signal acquisition and processing were realized in the labVIEW environment. Through calling matlab in labVIEW, the signals from optical fiber detector were wavelet denoised and decomposed, thus the temperature information was extracted, and the temperature value was obtained. On basis of wavelet transformation, the paper adopted the 4dB wavelet with horizontal scale of 5 to realize the feature extraction and noise removal, parts of the signals before and after the wavelet noise removal were given and analyzed. Finally, the experimental result shows: the resolution is 1°C,the measurement range is 500~2000°C and the dynamic response time is 5s.In view of possessing a high precision and resolution, resisting high temperature and corrosion, and being able to realize the continuous measurement of the dynamic temperature, this transient optical fiber high temperature measurement system can be applied widely in the continuous temperature measurement of molten steel and heating furnace kiln temperature measurement and so many other fields of engineering technology.

For MEMS devices required to be operated in a hermetic environment, one of the main reliability issues is related to the packaging methods applied. In this paper, an optical method for testing low volume hermetic cavities formed by anodic bonding between glass and SOI (silicon on insulator) wafer is presented. Several different cavity-geometry structures have been designed, fabricated and applied to monitor the hermeticity of wafer level anodic bonding. SOI wafer was used as the cap wafer on which the different-geometry structures were fabricated using standard MEMS technology. The test cavities were bonded using SOI wafers to glass wafers at 400C and 1000mbar pressure inside a vacuum bonding chamber. The bonding voltage varies from 200V to 600V. The bonding strength between glass and SOI wafer was mechanically tested using shear tester. The deformation amplitudes of the cavity cap surface were monitored by using an optical interferometer. The hermeticity of the glass-to-SOI wafer level bonding was characterized through observing the surface deformation in a 6 months period in atmospheric environment. We have observed a relatively stable micro vacuum-cavity.

Zinc oxide (ZnO) with a wide band gap of 3.37 eV, and a large exciton binding energy of 60 mV at room temperature, is one of the most important n-type semiconductor, that has potential applications in the area of short-wavelength optoelectronic devices, gas sensors, solar cells, and field emitters. Some advanced nanodevices based on one-dimensional (1-D) ZnO nanomaterials have been successfully demonstrated in the past few years. The types of substrate have a great influence on the properties of ZnO nanostrctural devices. Semiconductor substrates such as Si and Al2O₃ were widely used for the collection or epitaxial growth of ZnO nanostructures, for metal substrate, Fe and Cu foil has also been used as substrate, there are few reports on ZnO nanowires grown on Ti foil, Ti is an important electrode metal that ohmic contact can be appropriately achieved, which is critical for semiconductor device application. Besides, both Ti and ZnO show good biocompatibility, it is expected that ZnO nanowires/ Ti show good performance on bio-sensors. In this paper, 1-D ZnO nanostructures have been successfully fabricated on the conductive Ti substrate via a vapor phase transport (VPT) method by carbothermal reduction of ZnO and graphite powder mixture in a tube furnace at 850°C. The final products were characterized by means of field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), high-solution transmission electron microscope (HRTEM) (equipped with selected area electron diffraction, SAED), and photoluminescence (PL) spectroscopy. FE SEM results show that dense, ultra-long (>10μm), and locally aligned ZnO nanowire arrays were grown on the Ti foil. The diameter of nanowires exhibits a wide range from 150 nm to about 500nm. Structural characterizations (XRD, SAED, HRTEM) indicate the as synthesized nanostructures have a ZnO wurtzite structure and are perfect single crystalline without any defects or impurities. The growth direction is [0001]. Optical property (PL spectrum) shows strong UV emission is detected in our sample.

Pyroelectric materials take the most important role in pyroelectric infrared detectors. A high temperature above 550°C is required to obtain the traditional pyroelectric films such as PZT, BST, etc., which would hold back the realization of integration of pyroelectric thin film monolithic uncooled focal plane array (UFPA). Zinc oxide (ZnO) has been studied widely in recent years because of its excellent semiconducting, optical, piezoelectric and pyroelectric multiple properties. All these imply its potential applications in photo-catalysis, composite materials, dye-sensitized solar cells, sensors, as well as in UFPA applications. In the wurtzite structure of ZnO, it is easy to replace Zn by doping other metal elements such as Al, Ga, In, Sn, Cr, Mg, etc. for tailoring its properties. Thus an ideal preparation method is demanded to easily control the particle size, size distribution, crystallinity and morphology. On the other hand, the structureperformance relationship of ZnO in pyroelectric applications is still not clear. In the present work, we developed a surfactant-assisted complex sol-gel method, which allows easily control of the particle size, size distribution, crystallinity, morphology and doping of ZnO nanoparticles. Two types of ZnO nanoparticles including pure ZnO and magnesium doped ZnO were prepared for our investigation. Their detailed morphology, structural, optical properties would be presented. Pure wurtzite structure was obtained after 500°C calcinations for the sample with the Mg concentration in Mg_xZn_1-xO below 10 at%. Well dispersed ZnO-based nanoparticles with uniform size distribution were obtained using PEG 2000 as a surfactant. The as-obtained ZnO-based nanoparticles were also sintered for pyroelectric property test. Their pyroelectric properties were compared in order to reveal its possible applications as target materials for pyroelectric films preparation in infrared detector arrays.

The paper proposes a novel demodulation method of fiber grating displacement sensing with applying dual grating structure. The linear tuning sensitive structure of isosceles triangle-shaped cantilever beam is designed which can be used to eliminate the influence from environmental temperature. The fiber grating is pasted in the cantilever top and under both sides. When the cantilever free end take place the displacement, this would generate strain which can make the gratings compression and tensile respectively, furthermore, cause the changes of Bragg grating reflection wavelength. The changes of grating is caused by temperature influence in the same direction, and caused by stress change in the opposite direction. Therefore, the change of optical power caused by temperature was offset, that is, eliminate the influence from environmental temperature. When the free end has displacement or load, the grating on beam top surface was stretched, Bragg wavelength drift to the long-wave direction, and the grating under the surface is compressed, which make wavelength drift to the short-wave direction. The changes of light intensity can be seen from the spectrogram. Using linear tuning properties without chirped of cantilever beam, micro-displacement in the free end can effective turned into the strain of equal intensity beam. The changes of Bragg wavelength caused by strain can be shown in optical power meter, and would be transformed into voltage display through demodulation system. Therefore, displacement sensing information is derived indirect; the optical measurement of micro-displacement is realized. The experiment result shows the system sensitivity is 0.87mV/μm, and displacement resolution is 2.12nm/mm.

The traditional light-pen portable coordinate measuring machine earns the disadvantages of slow data acquisition speed and difficult mode-changing. The new type light-pen portable coordinate measuring machine is designed to overcome the shortages. On the base of CMOS image sensor, FPGA and DSP are used as the data processing core of this machine. The basic arithmetic of a picture is resolved by the FPGA, while DSP completes the modeling of this system, error compensating and other advanced arithmetic. The camera only needs to transfer the three-dimensional coordinate of the point to be measured. Wireless transport is used to take the place of USB, which can achieve a large-scale measurement. The light pen and computer of the new system are put nearby where can be operated by a single man, which can improve the measurement efficiency much.

Thermal oxidation interfacial layer was inserted into the GaN-based material and Schottky contact interface during the device preparation to increase the barrier height. Different thickness of thermal oxidation interfacial layer was created by keeping the chips in the Rapid Thermal Processor (RTP) in atmosphere ambient for different periods of time before evaporating transparent Schottky contact. For GaN Schottky diodes, as the time kept in RTP increases, the diodes' zero-bias resistances decrease and the dark current increase considerably, and the peak photoresponse and UV-visible rejection factor of the responsivity of the diodes decrease abruptly. For Al_0.45Ga_0.55N Schottky diodes, as the time increase, the diodes' zero-bias resistances and dark current increase slightly, while the peak photoresponse and the UV/visible rejection factor of the responsivity of the diodes decrease a little.

This work reported a preliminary study of doped ZnO nanoparticles by fine optical group-I_B element Ag as the foundation to achieve p-type conduction of ZnO. Ag-doped ZnO nanoparticles were synthesized under lower temperature by annealing treatment in water-soluble silicone oil to the precursor [Zn(OH)₄]^2- with Ag⁺ prepared in a quaternary reverse micro-emulsion. The products were characterized by X-ray diffraction (XRD), Transmission Electron Microscope (TEM), UV-visible spectroscopy and photoluminescence spectra (PL). The influence of Ag doping level on the optical properties of ZnO nanoparticles was studied and the photoluminescence mechanism was analyzed. The origin of relative variety of near band edge emission (NBE) and deep level emission (DLE) of ZnO in virtue of incorporated Ag⁺ was discussed. The value of OH-/Zn²⁺ in precursor and annealing temperature also effected the optical properties of Ag doped ZnO. The optimum conditions were given for preparation of Ag-doping ZnO nanoparticles.

Compared with traditional sensor system, the modern micro-sensor system was characterized with intelligent and internet, and required the sensor system was less volume, much lighter, using less energy and was able to process the great amount of received data by itself, so as to get the best results. But good results often required more resources such as more computing ability and more volume and more power. The traditional embedded OS (Operating System) which often required more resources did not apply to modern micro-sensor system. New embedded OS specialized for modern micro-sensor system had to be developed. The general characters of modern micro-sensor system and its requirements for embedded OS were discussed at first in this paper. Then a variety of embedded OS for micro-sensor system were presented and classified by the realizing principle (realized by methods of components, virtual machine, layered structured, state machine and function library.etc.). The using effect and applied domains of the embedded OS were discussed explicitly. At last the severely key problems, the status and new hot field of the embedded OS were pointed.

A large area of N-ZnO/P-CuS junction arrays on silicon wafer is successfully fabricated by the method of layer-by-layer deposition cycle. The thicknesses of CuS shell are tuned by controlling the times of layer-by-layer deposition cycle. Three samples with different CuS shell thicknesses are fabricated and their J-V characteristics show good rectification behavior. The threshold voltages are about 2.5 V at the voltage scans of ± 3 V. The field emission properties of three samples are inveatigated. The turn-on fields of three samples are 6.15 V/μm, 8.75 V/μm, and 10.59 V/μm, respectively. The threshold fields of three samples are 10.46 V/μm, 13.71 V/μm, and 15.2 V/μm, respectively.

A new fiber Bragg grating (FBG) sensing demodulation system based on Lab VIEW and the technology of fiber Bragg grating sensing is designed. The system based on unbalanced M-Z interferometer demodulation technique translates the FBG wavelength signal related with the strain in to phase signal and measures the change of the phase with a phase measurement system based on Lab VIEW. With the characteristics of high resolution and wide measurement range, this sensor system has the capability of measuring static strain as well as dynamic strain. Experimental shows that the result of strain tested and theory one have a good linear relationship. The strain sensitivity of the experiment system is 1.2pm/με.

Engine vibration accounts for around 55% of automobile vibration, separating the engine vibration from transmitting to automobile to the utmost extent is significant for improving NVH performance. Semi-initiative and initiative control of engine vibration is one of the hot spots of technical research in domestic and foreign automobile industry, especially luxury automobiles which adopt this technology to improve amenity and competitiveness. This article refers to a large amount of domestic and foreign related materials, fully introduces the research status of semi-initiative and initiative control suspension of engine vibration suspension and many kinds of structural style, and provides control policy and method of semi-initiative and initiative control suspension system. Compare and analyze the structural style of semi-initiative and initiative control and merits and demerits of current structures of semi-initiative and initiative control of mechanic electrorheological, magnetorheological, electromagnetic actuator, piezoelectric ceramics, electrostriction material, pneumatic actuator etc. Models of power assembly mounting system was classified.Calculation example indicated that reasonable selection of engine mounting system parameters is useful to reduce engine vibration transmission and to increase ride comfort. Finally we brought forward semi-initiative and initiative suspension which might be applied for automobiles, and which has a promising future.

Measurements of glucose concentration are important parts of biochemical analyses. Based on the principles of the common-path heterodyne interferometry, we develop a high sensitivity optical sensor for measuring glucose concentration. A heterodyne light beam after transmitted through a glucose solution passes through some polarization components for interference. The phase difference determined with heterodyne interferometric technique of the interference signal is greatly enhanced as a result of proper azimuth angles of some polarization components, and a high sensitivity measurement of glucose concentration can be achieved. The feasibility of the measuring method was demonstrated by our experimental results. This optical sensor should bear the merits of high accuracy, short sample medium length, and simpler operational endeavor.

The distortion of the collected images usually takes place since the attitude changes along with the flying aerocraft on airborne remote sensing. In order to get original images without distortion, it is necessary to use professional gyro-stabilized platform. In addition to this, another solution of correcting the original image distortion is to utilize later geometric rectification using position & orientation system ( POS ) data. The third way is to utilize medium-accuracy stabilized platform to control the distortion at a tolerant range, and then make use of the data obtained by high-solution posture measure system to correct the low-quality remote sensing images. The third way which takes advantage of both techniques is better than using only one of the two other ways. This paper introduces several kinds of structural forms of gyro-stabilized platforms, and POS acquiring instruments respectively. Then, the essay will make some analysis of their advantages and disadvantages, key technologies and the application experiment of the third method. After the analysis, the thesis discusses the design of the gyro-stabilized platform. The thesis provides crucial information not only for the application technology of gyro-stabilized platform and POS but also for future development.

The GaAs photoconductive semiconductor switch is an important device in the measurement of the signal of ultra high-speed. In this paper, the transmission model of transient signals on GaAs PCSS is given. Based on the testing result of delay-time-modulation method, the relationship between signal amplitude and the form of connection mode is analyzed and discussed. The conclusion is that the pulse width of output transient signal is decided by the width of laser pulse and the carrier life and the key point of getting the transient signal is the coupling of capacity.

SiO₂ and SiO₂-TiO₂ composite nanoporous coating was successfully prepared via sol-gel method in this paper. By the control of the different porosity of SiO₂ coating and content of TiO₂ in the mixture, the refractive index of the coatings can be adjusted from 1.17 up to 2.20 continuously, which can be well matched with most of the optic materials used in versatile detectors. Meanwhile, the thickness of the crack free SiO₂ and SiO₂-TiO₂ nano-composite coatings can be easily controlled by employing different experimental parameters. As a typical example, a coating with refractive index of 1.82 was prepared for a GaAs based IR detectors. In 2.5 - 6.0μm waveband, the maximum transmittance of GaAs substrate is increased from 56% for uncoated sample to 94% for coated sample, which agrees with the theoretical results quite well.

A novel type of double-crystal probe with one transmitter and multiple receivers is developed. Based on the probe with one transmitter and one receiver, this designed probe includes one longer transmitting crystal plate and multiple receiving crystal plates with the same length each other. These receiving crystal plates can receive respectively ultrasound echo at the same time. We have manufactured the probe with one transmitter and three or four receivers. Finally we carry out the integrated experiment to test the performance of probe. The testing result shows that three receiving crystal plates have the equal effective sound beam width and uniform sound field distribution. Contrasted to the conventional probe, the novel probe not only overcomes the disadvantage that flaw quantitative error enlarges with the increment of transmitting crystal plate length, but also improves the dynamic coupling stability of probe at the mean time of increasing effective sound beam width. Moreover, resolution to detect flaw near the surface is also advanced. This type of probe can improve effectively the testing speed and flaw detection sensitivity. So the qualification of thick steel plates' automatic inspection is also improved greatly.

Traditional commercial instruments utilized in vision screening programs cannot satisfy the request for real-time diopter measurement by far, and their success is limited by some defectiveness such as computer-attached, clumsy volume, and low accuracy of parameters measured, etc. In addition, astigmatic eyes cannot be determined in many devices. This paper proposes a new design of diopter measurement system based on SAMSUNG's ARM9 circuit block. There are several contributions in the design. The new developed system has not only the function of automatically measuring diopter, but also the advantages of the low cost, and especially the simplicity and portability. Besides, by placing point sources in three directions, the instrument can determine astigmatic eyes at the same time. Most of the details are introduced as the integrated design of measuring system, interface circuit of embedded system and so on. Through a preliminary experiment, it is proved that the system keeps good feasibility and validity. The maximum deviation of measurement result is 0.344D.The experimental results also demonstrate the system can provide the service needed for real-time applications. The instrument present here is expected to be widely applied in many fields such as the clinic and home healthcare.

In order to increase the species of organic infrared semiconductor, we synthesized organic infrared semiconductor phthalocyanine gadolinium by using o-phthalodinitrile and GdCl₃ as reactants, ammonium molybdate as catalyzer. Under light and dark field modes of microscope, the translucency emerald-like powder of phthalocyanine gadolinium has been observed, the size of the small grain for the sample is around 5μm in diameter, the size of larger grain may reach to several tens of microns. The main vibrational peaks in FT-IR spectrum and Raman spectrum have been assigned. Elementary analysis shows that the experimental data of phthalocyanine gadolinium in the main agree with those of calculated data. The UV-Vis absorption spectrum of the sample indicates the sandwich-like structure of phthalocyanine gadolinium. The organic infrared semiconductor phthalocyanine gadolinium thin film on quartz substrate has been prepared with our synthesized powdered sample by using solution method. The characterizations of XRD and UV-Vis-NIR absorption have been carried out for the phthalocyanine gadolinium thin film on quartz substrate, XRD shows that phthalocyanine gadolinium diffractions occur at 2θ=6.851,8.290 and 8.820 degrees, the corresponding plane spacings (d) for the diffraction peaks are 12.8921, 10.6570, and 10.0176Å.The diffraction peaks locate at low diffraction angle, suggesting that the molecular size of the phthalocyanine gadolinium is big that causes the large spacing of crystal planes. The UV-Vis-NIR absorption of phthalocyanine gadolinium thin film on quartz substrate implies that within near infrared band there is a absorption in the 1.3~2.0μm wavelength range peaked at ca. 1.75μm, indicating the important potential application value of phthalocyanine gadolinium in the field of organic infrared optoelectronics.

The study of FT-IR spectrum, Raman spectrum, UV-Vis absorption spectrum as well as photoluminescence spectrum on organic ultraviolet semiconductor KIP-OUVS-1 has been investigated. The main vibrational peaks of organic ultraviolet semiconductor KIP-OUVS-1 in FT-IR spectrum and Raman spectrum have been assigned. The study of UV-Vis solution absorption spectrum on the organic ultraviolet semiconductor KIP-OUVS-1 shows that there is an obvious ultraviolet absorption peak in 210~280nm range, there are several ultraviolet absorption peaks in 290~390nm range too. The photoluminescence spectra of organic ultraviolet semiconductor KIP-OUVS-1 at different excitation wavelengths have also been investigated, the result shows that in the excitation wavelength of 220~360nm range, the shapes for different photoluminescence peaks are similar under different excitation wavelengths, the sole difference among them is strength of the peaks. At 280nm and 300nm excitation wavelengths, the relatively strong peaks have been gotten, at 220nm and 250nm excitation wavelengths, however, the photoluminescence peaks are relatively weak. Furthermore, for organic ultraviolet semiconductor KIP-OUVS-1, the photoluminescence peaks have a stokes' red shift compared with those absorption peaks for the solution samples, and an enantiomorphous symmetry, which is the powerful experimental proof of Franck-Condon theory, between the absorption spectrum and photoluminescence spectrum has been observed too. For the reason that the organic ultraviolet semiconductor KIP-OUVS-1 may be used to prepare large-area thin film and flexible device on low-price, flexible substrates by means of thermal evaporation and solution method, thus, the authors deduce that the organic ultraviolet semiconductor KIP-OUVS-1 may have an important application potential in ultraviolet optoelectronic detecting or lighting field.

Toxoplasma gondii is a kind of microscopic parasite that may infect humans, and there are increasing concerns on the early detection of latent Toxoplasma gondii infection in recent years. This research highlights a new type of molecular beacon (MB) fluorescent probe for Toxoplasma DNA testing. We combined high-efficiency fluorescent inorganic core-shell quantum dots-CdTe/ZnS (as fluorescent energy donor) and BHQ-2 (energy acceptor) to the single-strand DNA of Toxoplasma gondii, and a molecular beacon sensing system based on fluorescence resonance energy transfer (FRET) was achieved. Core-shell quantum dots CdTe/ZnS was firstly prepared in aqueous solution, and the influencing factor of its fluorescent properties, including CdTe/Na₂S/Zn(CH₃COO)₂ (v/v), dependence of reaction time, temperature, and pH, is investigated systematically. The synthesized quantum dots and molecular beacon were characterized by transmission electron microscopy (TEM), ultraviolet-visible spectrophotometer (UV-vis), fluorescent spectrophotometer (FS), respectively. The TEM results showed that CdTe/ZnS core-shell quantum dots is ~11nm in size, and the quantum dots is water-soluble well. The sensing ability of target DNA of assembled MB was investigated, and results showed that the target Toxoplasma gonddi DNA can be successfully detected by measuring the change of fluorescence intensity. The results showed that the current sensing probe will be a useful and convenient tool in Toxoplasma gondii early detection.

Wireless infrared communication systems are widely-used for the remote controls in portable terminals, particularly for systems requiring low cost, light weight, moderate data rates. They have already proven their electiveness for short-range temporary communications and in high data rate longer range point-to-point systems. This paper proposes the issue of design and implementation of an infrared device driver in a personal portable intelligent digital infrared communications system. After analyzing the various constraints, we use the embedded system based on Samsung S3C2440A 32-bit processor and Linux operating system to design the driver program. The program abandons its traditional Serial interface control mode, uses the generic GPIO to achieve infrared receiver device driver, and intends a user-defined communication protocol which is much more simple and convenient instead of traditional infrared communication protocol to design the character device drivers for the infrared receiver. The communication protocol uses interrupt counter to determine to receive the value and the first code.In this paper, the interrupt handling and an I/O package to reuse Linux device drivers in embedded system is introduced. Via this package, the whole Linux device driver source tree can be reused without any modifications. The driver program can set up and initialize the infrared device, transfer data between the device and the software, configure the device, monitor and trace the status of the device, reset the device, and shut down the device as requested. At last infrared test procedure was prepared and some testing and evaluations were made in a mobile infrared intelligent cicerone system, and the test result shows that the design is simple, practical, with advantages such as easy transplantation, strong reliability and convenience.

In the application of micro-structural monitoring, one kind of flexible and stretchable sensing elements was urgently demanded to detect the micro-bending and surface distortions, such as micro-bend sensing elements of medical catheter or smart skin sensing unit of micro-robots. Here the sensing element must be stretchable and flexible for free operation, and must be safe enough when used in bio-medical situation. Although the optical fiber grating is very mature and can be used as sensing element in micro-bending situation, it isn't stretchable enough and flexible enough when used in bio-medical science and micro- structural monitoring, and when applied in human body, the fiber grating isn't safe enough for its easily broken character. In this paper a kind of novel flexible and stretchable polymer grating sensing elements was fabricated by micro-replication process which could be used in micro- structural monitoring, and detailed processes was presented and discussed.

The unusual optical transmission enhancement is observed during exploring the optical properties of the periodically patterned metal films. We fabricate the nanohole array on gold film with the focused ion beam techniques. The transmittance is higher than the ratio of the area occupied by the holes and the total etching area. The dependences of the transmittance on the thickness of metal film and the radius of hole are obtained. Theoretical calculations show that extraordinary optical transmission is due to coupling of surface plasmon modes on the same surface, as well as coupling of modes on both sides of the metal film. The calculated data are in good agreement with the experimental results. After the analysis of the phenomena, we predict that the periodically modulated metal film is useful in field of photoelectronic detecting and imaging.

Currently, MEMS tunable grating draws a lot of attentions due to its promising applications in display, spectrometer, external cavity laser, programmable mask, optical telecommunication, etc. Among phase-tunable and incident-angletunable grating, period-tunable grating distinguishes itself by relative simple structure, ease-to-fabrication, good performance, and ability to be integrated with IC. In this paper, a novel approach based on compressed period grating is demonstrated. Based on a developed comb-drive actuator working in a low voltage of 37V, our grating period was compressed for 12.5%. The first resonant mode of the comb-drive actuator was simulated to be 3.8 kHz by finite element modeling.

In this paper, the design, simulation, fabrication and testing of an integrated thermoelectric infrared sensor have been demonstrated. The integrated thermoelectric sensor has been fabricated by a standard p-well CMOS technology and a maskless XeF₂ post-CMOS micromachining process. The modeling of the infrared sensor has been performed numerically using FEM method. With a 2.5 μm thick stacked silicon oxide-nitride-oxide multi-layers as absorber, the prototype sensor achieved a responsivity of 14.7 V W^-1, a specific detectivity of 4.07 × 10⁷ cm Hz^1/2 W^-1 and a time constant about 23 ms. The effects of XeF₂ etching on the CMOS devices have also been studied. XeF₂ post-CMOS micromachining was found to have insignificant effects on CMOS devices.

This paper reports a nodal model for the trapeziform beam element with gradual change cross-sections. Using this model, electromechanical behavior of the electrically actuated bow-tie shaped fixed-fixed beams can be simulated in a system level. The model is developed by treating the governing equations of the trapeziform beam based on the Galerkin residual method and decomposing the 4th-order partial differential equation into discrete modal ordinary differential equations. After that, the equivalent circuits and corresponding nodal model are established. In the model, the nonlinearities including mid-plane stretching and electrostatic forcing are considered. The accuracy of the developed model is verified by extensively comparing the static and dynamic analysis results with those obtained from FEA and available experiment data. The developed model is also applicable to beam-like structures with uniform cross-sections.

Electro-statically actuated sub-micro beam resonators, which can be used as sensors in biology or filters in wireless communications, have gotten significant attention due to their simple geometries, excellent electrical and mechanical characteristics and extensively potential applications. In this paper, we present comprehensive analysis of the nonlinearity in frequency response of sub-micro cantilevers, clamped-clamped and beam resonators which are actuated by electro-static force. The spring hardening effects and softening effects are observed in the experiment. It is found that the nonlinearity is relatively independent of the AC voltage, but is markedly enhanced by increasing of DC voltage. However, the response nonlinearity of the doubly clamped beam shows different feature from that of the cantilever. The reason is also explored in this paper. A nonlinear model is introduced to explain the nonlinearity of the frequency response. This investigation provides us an understanding of the nonlinear dynamic characteristics of sub-micro beam resonators. It is helpful for us to study the sensitivity when the beam is used in a detecting system or used to be a sensor.

In this paper, we developed a four-layer theory that is capable of calculating LPFGs with real metallic coatings using matrix method. The resonant spectrum characteristics of LPFGs coated with various metallic films are investigated in detail. The resonant wavelength shifts of LPFGs with the change of refractive index of surrounding media over different metallic thicknesses are obtained. It is found theoretically that there exists an optimal range of metallic thickness within which the maximal measurement sensitivity for the refractive index change of surrounding media can be obtained.

Flip chip is one of the advanced packaging technologies, and it has been widely used in MEMS (micro-electromechanical system) packaging due to its manifold advantages compared with the traditional packaging methods. However, there are also many problems to be solved, especially, MEMS sensors are often inherently sensitive to stress induced by their packages because most MEMS sensors include movable structures. In this paper, the thermomechanical characteristic of a flip chip package with different parameters is studied by using the numerical simulation methods .The distribution pattern of flip chip solder bumps including four kinds of all arrays are considered specially, as it is a key design parameter in the technology and has distinct effect on the performance of MEMS sensors with movable structures. The result shows that the position of the structures on the chip should be considered seriously. For the microcantilever and microbridge with 400μm length and 2μm thickness fabricated by surface process, the stress and warpage can lead to a maximum relative change of 5% in the pull-in voltage of a microcantilever and 110% in the first resonant frequency of a microbridge after flip chip packaging, when the temperature changes from 25°C to 125°C.

A conventional one-dimensional model for an electrostatically actuated beam only considers elastic force and electrostatic force. This paper puts forward a novel method in order to describe the variable cross-section beam. Three improvements are taken into account. First, the supported force for the cross-section is pondered. Second, the displacement of each points of the beam deviates from the ideal function. Third, the displacement differs both in x-axis and y-axis. In addition, there is a mathematic redundancy about integral when the electrostatic force is calculated. Therefore, a mathematical approximation is proposed, by which the mathematical computation can be remarkably simplified while the accuracy is ensured. To validate the novel mode, the displacement of mid-point and the resonant frequency of the beam were calculated as far as these three modifications were concerned. The simulations by a Finite Element Method (FEM) CoventWare have been compared with the novel model. It is shown that the two-dimensional (2-D) model for the variable cross-section beam would be useful.

Adhesion, as one of the most common failure modes compromising reliability of optical MEMS devices, attracted great research interests for enhancing the production yields and device reliability. Experiments show that wet-adhesion with respect to capillary force between interfaces of movable structures is generally the dominant figure among all adhesion natures. Great efforts had been made on examine adhered length of micro-cantilevers to modeling adhesion energy, which are reasonable to predict adhesion in quasi static process such as sacrificial layer release processes. However, the microcosmic mechanism of adhesion has not been well revealed, thereby these models are not sufficiently precise for in-situ adhesion, such as adhesion due to mechanical shock. In this work, a novel model of adhesion energy is derived by review the physical mechanisms carefully and shock caused adhesion is studied applying this model.

Recently, the inclined UV lithography technology based on SU-8 negative thick photoresists has been mature and attractive due to the in-depth research of SU-8. With the increasing demand for the high-fidelity oblique structures of SU-8, the simulation of inclined UV lithography becomes more important. Based on the Fresnel-Kirchhoff diffraction theory, a simple light intensity distribution model is established in this paper by the Fresnel approximation and paraxial approximation solutions to simulate the 2D inclined UV lithography. The refraction and reflection at the air/photoresist interface and the reflection at the substrate surface are integrally considered in the modeling. The oblique SU-8 structures were fabricated on both glass wafers and silicon wafers, which show different reflection-induced profiles after development. According to the comparison of the simulation and experimental results, it is demonstrated that the substrate reflection has significant influence to the inclined UV lithography, and the validity of the model is also verified.

In this paper, we investigate Young's modulus of Si nanofilms and Si nanowires under surface reconstruction with different temperature range from 100K to 800K by Molecular dynamics simulations. Young's modulus is calculated from energy-strain relationship. The results show that the Young's modulus of Si nanofilms decreases as temperature increases. The temperature effect on Young's modulus of Si nanowires also could not be ignored. Surface effect on nanostructures is more significant than on macrostructures, and Si nanostructures are more sensitive to heat.

The vortex flowmeter works in a poor environment, therefore the stability and accuracy of the online testing system have become the core question for getting high accuracy. The optical probe is the main part of the system which produces and obtains the vortex signal. This paper designs the vortex shedder according to the hydromechanics principle, and it is proposed to be ringlike structures, also gives the test results which prove the effectiveness of the shedder on vortex decomposition. A liquid flow online testing system is designed according to the vortex signal characteristics, and the optical fiber is chosen as the sense organ. Then it designed the probe's parameters and the necessary important circuits of the system to further increase its accuracy. It also assembles the sensor system which is designed to insure the rationality, reliability, stability of the structure. Finally it proposed the methods on the coefficient revision and the liquid condition parameter compensation to get higher accuracy.

ZnO thin films doped with aluminum (AZO) were deposited on silicon dioxide covered p-Si (100) substrates by radio frequency magnetron sputtering, to fabricate AZO/SiO₂/p-Si heterojunction, as an absorber for ultraviolet cell. The optical and electrical properties of the Al doped - ZnO films were characterized by UV-VIS spectrophotometer, current-voltage measurement, and four point probe technique, respectively. The results show that AZO films have good quality. The electrical junction properties were investigated by I-V measurement, which reveals that the heterojunction shows typical rectifying behavior.

Illumination is responsible for the consumption of 19% of the total electricity consumption worldwide. Efforts to reduce the consumption of this energy fraction are, therefore, increasingly taking the attention of many governments. Denmark, as one of the leader countries in environmental actions, is engaged in several actions to reduce its CO₂ emissions. The problem severity demands a capacity to react quickly and efficiently to better reach the international goals. Traditionally, the efforts have concentrated on the residential sector. Consequently, the aim of this paper is to contribute to the discussion on where the effort shall be strategically directed. We look at the international tendencies with specific focus on Europe and chose Denmark as a representative example to illustrate the way in which the policies focus on the residential sector instead of the commercial and services sectors. This paper conclude that the available statistics so far show that in Europe the commercial and service sector is responsible for the highest electricity consumption due to illumination. The same pattern repeats in Denmark. Therefore, this paper argues that in order to achieve even more optimal solutions, a more detailed differentiation of data shall be pursued by the electricity companies. It is suggested that detecting the right sector will give possibilities to better target actions with higher impact potential.

This paper studied the evaluations of magnetic force of magnetic immersed body in magnetic fluids, which is the prerequisite and basis for a novel inertial sensor can achieve. The novel inertial sensor is proposed based on the levitation characteristic of magnetic fluid and can be applied to many specific areas. The analyzed and calculated of the second-order magnetic force in such system is the key physical to ensure the permanent magnet to achieve a stable suspension, and it also difficult to solve. This paper established a magnetic force model of cylindrical permanent magnet, and the set of equations by the Laplace equation, transformation of coordinate equation, and boundary relationship. Finally, analytical solutions of magnetic field strength of immersed cylindrical permanent magnet obtained through approach of mathematical physics. The results are universal and must of great significance in research of levitation characteristic of magnetic fluid, including its possible applying for different novel sensors.

Single phase polycrystalline pellets of CuMO₂ (M = Al, Cr, Y) semiconductors with delafossite structure were prepared by sol-gel method and solid state reaction, respectively. The XRD results shows that structure can be indexed as 3R-CuAlO₂ (JCPDF No. 35-1401), 3R-CuCrO₂ (JCPDF No. 89-6744) and 2H-CuYO₂ (JCPDF No. 76-1422), respectively. The conductivities of CuMO2 are thermally activated in the measured temperature range with the activation energy E_A about 0.24eV, 0.34eV and 0.25eV, respectively. The conductivities of CuMO₂ decrease monotonously with the increase of radius of M cation. This phenomenon coincides with the previous theoretical studies that the hole conduction path of CuMO₂ was predominantly in the Cu-ions layers, and the Cu-Cu spacing (or α-axis length) was governed by the M cation size, which modifies the wave function overlap between Cu-ions and results in decrease of the conductivities. The room temperature ozone sensing properties of CuMO₂ (M = Al, Cr, Y) polycrystalline pellets were studied. Ozone-purified air-ozone circles were used to measure the ozone gas sensing properties of all the specimens, which are similar to the practical measurement environments. The relative humidity of the environment was controlled around 60 RH% ± 5 RH%. The temperature was controlled around 300K ± 0.5K. Except for CuYO₂ pellets, CuAlO₂ and CuCrO₂ pellets show reversible responds to ozone gas at room temperature. The room temperature ozone sensing properties of CuCrO₂ film prepared by pulsed laser deposition was also studied. The response time of CuCrO₂ film is about 3.5 min to 90% of the final value and the recovery time is about 2 min to 10% of the steady state signal under ozone concentration of 600 ppm. Though the performance is not yet sufficiently high for practical use, the delafossites CuMO₂ (M = Al and Cr), as parent compounds of room temperature ozone sensing materials, are recommendable for further studies on the improvement of ozone sensing properties.