Mr. Fuminori Hayano Profile

Fuminori Hayano

Assistant Department Manager at Nikon Corp

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 2 April 2010 Paper

Method for wafer edge profile extraction using optical images obtained in edge defect inspection process

Hiroaki Okamoto, Naoshi Sakaguchi, Fuminori Hayano

Proceedings Volume 7638, 763826 (2010) https://doi.org/10.1117/12.848315

KEYWORDS: Semiconducting wafers, Wafer-level optics, Image processing, Inspection, Cameras, Defect inspection, Confocal microscopy, Diffusion, Profiling, Data conversion

Read Abstract +

Proceedings Article | 2 April 2010 Paper

New measurement technology for CD and pattern profile variation using optical Fourier space

Fuminori Hayano, Akitoshi Kawai, Toshio Uchikawa, Kazumasa Endo, Kiminori Yoshino, Yuuichiro Yamazaki, Kuniharu Nagashima, Kenji Tsuchiya

Proceedings Volume 7638, 76380E (2010) https://doi.org/10.1117/12.846336

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Wafer-level optics, Birefringence, Reflectivity, Photoresist materials, Polarization, Objectives, Astronomical imaging, Semiconductors

Read Abstract +

Proceedings Article | 23 March 2009 Paper

New inspection technology for hole pattern by Fourier space on hp 4x-nm generation

Akitoshi Kawai, Fuminori Hayano, Kazumasa Endo, Kiminori Yoshino, Yuichiro Yamazaki

Proceedings Volume 7272, 727219 (2009) https://doi.org/10.1117/12.814046

KEYWORDS: Diffraction, Semiconducting wafers, Critical dimension metrology, Inspection, Optical simulations, Wafer testing, Wafer-level optics, Polarization, Birefringence

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years