Mr. Kuniharu Nagashima Profile

Kuniharu Nagashima

at Toshiba Materials Co Ltd

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Author

Publications (2)

Proceedings Article | 2 April 2014 Paper

The measurement uncertainty of CD measurement in the optical measurement technology using Fourier image

Kuniharu Nagashima, Hideaki Abe, Makoto Oote, Yuichiro Yamazaki

Proceedings Volume 9050, 905034 (2014) https://doi.org/10.1117/12.2048759

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Calibration, Optical testing, Image processing, Metrology, Scatterometry, Image analysis, Data processing, Polarizers

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Proceedings Article | 2 April 2010 Paper

New measurement technology for CD and pattern profile variation using optical Fourier space

Fuminori Hayano, Akitoshi Kawai, Toshio Uchikawa, Kazumasa Endo, Kiminori Yoshino, Yuuichiro Yamazaki, Kuniharu Nagashima, Kenji Tsuchiya

Proceedings Volume 7638, 76380E (2010) https://doi.org/10.1117/12.846336

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Wafer-level optics, Birefringence, Reflectivity, Photoresist materials, Polarization, Objectives, Astronomical imaging, Semiconductors

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