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Gukhyeon Hwang
at Jeonbuk National Univ.
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Publications (4)
Proceedings Article | 10 April 2024 Presentation + Paper
Dynamic ultra-thin film thickness line-profile extraction from a warped Si substrate
Proceedings Volume 12955, 1295512 (2024) https://doi.org/10.1117/12.3011000
KEYWORDS: Film thickness, Thin films, Mach Zehnder interferometers, Ellipsometry, Thin film deposition, Spectroscopic ellipsometry
Proceedings Article | 10 April 2024 Presentation + Paper
High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer
Proceedings Volume 12955, 129550F (2024) https://doi.org/10.1117/12.3010995
KEYWORDS: 2D materials, Inspection, Imaging systems, Visualization, Spatial resolution, Metrology
Proceedings Article | 8 December 2022 Paper
High speed thin film thickness mapping by using dynamic spectroscopic imaging ellipsometry
Daesuk Kim, Vamara Dembele, Sukhyun Choi, Gukhyeon Hwang, Saeid Kheiryzadehkhanghah, Inho Choi, Junbo Shim
Proceedings Volume 12480, 124800O (2022) https://doi.org/10.1117/12.2660191
KEYWORDS: Spectroscopy, Thin films, Imaging spectroscopy, Ellipsometry, Spatial resolution, Silicon, Imaging systems, Semiconducting wafers, Interferometry, Interferometers
Proceedings Article | 27 October 2021 Paper
Large scale thin film thickness uniformity extraction based on dynamic spectroscopic ellipsometry
Daesuk Kim, Gukhyeon Hwang, Sukhyun Choi, Vamara Dembele, Saeid Kheiryzadehkhanghah, Inho Choi, Chung Song Kim
Proceedings Volume 11927, 119270M (2021) https://doi.org/10.1117/12.2616271
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