Jiro Higuchi
at KIOXIA Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11328, 1132806 (2020) https://doi.org/10.1117/12.2557847
KEYWORDS: Photomasks, Lithography, Optical proximity correction, Bridges, Data analysis, Semiconducting wafers, Resolution enhancement technologies, SRAF

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