Dr. Jiuning Hu
at ASML
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12953, PC129530M (2024) https://doi.org/10.1117/12.3012722
KEYWORDS: Optical lithography, Reticles, Extreme ultraviolet, Process control, Critical dimension metrology, Computational lithography, Design and modelling, Optical proximity correction, Imaging systems, Tantalum

SPIE Journal Paper | 30 January 2024
Jiuning Hu, Adam Lyons, Chris Spence, Kurt Wampler, Mahmoud Mohsen, Yen-Wen Lu, Rachit Gupta, Youping Zhang, Rafael Howell, Jiyoon Chang, James Moon, Jun Ye
JM3, Vol. 23, Issue 01, 011204, (January 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.011204
KEYWORDS: Microchannel plates, Optical proximity correction, Lithography, Extreme ultraviolet, Deep ultraviolet, Solids, SRAF, Metals, Photovoltaics, Data storage

Proceedings Article | 28 April 2023 Presentation + Paper
Jiuning Hu, Adam Lyons, Chris Spence, Kurt Wampler, Mahmoud Mohsen, Yen-Wen Lu, Rachit Gupta, Youping Zhang, Rafael Howell, Jun Ye
Proceedings Volume 12495, 1249506 (2023) https://doi.org/10.1117/12.2658649
KEYWORDS: Optical proximity correction, Lithography, Extreme ultraviolet, Deep ultraviolet, Data storage

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