Dr. Juergen Mueller
at Carl Zeiss SMT GmbH
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 21 April 2022
JM3, Vol. 21, Issue 02, 023801, (April 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.023801
KEYWORDS: Wavefronts, Zernike polynomials, Scanners, Extreme ultraviolet, Spherical lenses, Monochromatic aberrations, Mirrors, Extreme ultraviolet lithography, Lithography, Sensors

Proceedings Article | 18 November 2020 Presentation + Paper
Proceedings Volume 11517, 1151715 (2020) https://doi.org/10.1117/12.2572878
KEYWORDS: Wavefronts, Extreme ultraviolet lithography, Scanners, Extreme ultraviolet, Transistors, Multilayers, Mirrors

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