Kazuhiro Nojima
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 31 October 2023 Open Access
Muneyuki Fukuda, Kazuhisa Hasumi, Takashi Nobuhara, Hirohiko Kitsuki, Zhigang Wang, Kazuhiro Nojima, Yusaku Suzuki, Akira Hamaguchi, Masashi Kubo, Masaya Hosokawa
JM3, Vol. 22, Issue 04, 041605, (October 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.041605
KEYWORDS: Modulation, Electron microscopy, Semiconducting wafers, Scanning electron microscopy, Electrical properties, Inspection, Defect detection, Scanning probe microscopy, Manufacturing, Defect inspection

Proceedings Article | 27 April 2023 Presentation + Paper
Muneyuki Fukuda, Kazuhisa Hasumi, Takashi Nobuhara, Hirohiko Kitsuki, Zhigang Wang, Kazuhiro Nojima, Yusaku Suzuki, Akira Hamaguchi, Masashi Kubo, Masaya Hosokawa
Proceedings Volume 12496, 124961O (2023) https://doi.org/10.1117/12.2658250
KEYWORDS: Modulation, Electron microscopy, Semiconducting wafers, Inspection, Defect detection, Scanning electron microscopy, Scanning probe microscopy, Electrical properties, Manufacturing, Nanometer integrated circuits, Semiconductor characterization

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116110M (2021) https://doi.org/10.1117/12.2583469
KEYWORDS: Computer aided design, Scanning electron microscopy, Failure analysis, Inspection, Optical inspection, Semiconductors, Machine learning, Defect detection

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