Dr. Steven E. Grantham
Physicist at National Institute of Standards and Technology
SPIE Involvement:
Conference Program Committee | Author
Publications (35)

Proceedings Article | 21 November 2023 Presentation + Paper
C. Tarrio, S. Grantham, R. Vest, T. Germer, B. Barnes, S. Moffitt, B. Simonds, M. Spidell
Proceedings Volume 12750, 127500F (2023) https://doi.org/10.1117/12.2686832
KEYWORDS: Extreme ultraviolet, Tunable filters, Metrology, Extreme ultraviolet lithography, Radiometry, Scatterometry, Vacuum chambers, Reflectivity, Polarization, Equipment

Proceedings Article | 14 June 2023 Presentation
Proceedings Volume PC12519, PC1251903 (2023) https://doi.org/10.1117/12.2664008
KEYWORDS: Imaging systems, Hyperspectral imaging, Spectrometers, Reflectivity, Colorimetry

Proceedings Article | 13 December 2020 Poster
Proceedings Volume 11445, 114453A (2020) https://doi.org/10.1117/12.2562046
KEYWORDS: Stars, Calibration, Spectral calibration, Astrophysics, Galactic astronomy, Astronomy, Large telescopes, Visible radiation, Near infrared, Environmental monitoring

Proceedings Article | 14 May 2018 Presentation
Proceedings Volume 10661, 106610C (2018) https://doi.org/10.1117/12.2305002
KEYWORDS: Imaging systems, Radiation thermometry, Temperature metrology, Calibration, Additive manufacturing, Metrology, Stray light, System integration, Pyrometry, Black bodies

Proceedings Article | 9 May 2016 Paper
Proceedings Volume 9738, 97380S (2016) https://doi.org/10.1117/12.2214246
KEYWORDS: Additive manufacturing, Laser processing, Process control, Optical design, Radiometry, Temperature metrology, Feedback control, Mirrors, Beam splitters, Fiber lasers, Imaging systems, Reflectivity, Sensors, Image processing, Optical scanning

Showing 5 of 35 publications
Conference Committee Involvement (7)
Dimensional Optical Metrology and Inspection for Practical Applications XIV
13 April 2025 | Orlando, Florida, United States
Dimensional Optical Metrology and Inspection for Practical Applications XIII
24 April 2024 | National Harbor, Maryland, United States
Dimensional Optical Metrology and Inspection for Practical Applications XII
2 May 2023 | Orlando, Florida, United States
Dimensional Optical Metrology and Inspection for Practical Applications XI
5 April 2022 | Orlando, Florida, United States
Dimensional Optical Metrology and Inspection for Practical Applications X
12 April 2021 | Online Only, Florida, United States
Showing 5 of 7 Conference Committees
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