SungHun Lim
at SK Hynix Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 1295517 (2024) https://doi.org/10.1117/12.3012913
KEYWORDS: Shrinkage, Etching, Extreme ultraviolet, Photoresist materials, Metrology, Semiconducting wafers, Extreme ultraviolet lithography, Photoacid generators, Stochastic processes, Critical dimension metrology

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 124963E (2023) https://doi.org/10.1117/12.2660114
KEYWORDS: Shrinkage, Photoresist materials, Extreme ultraviolet lithography, Critical dimension metrology, Photoacid generators, Metrology, Electron beams, Etching, Outgassing, Lithography

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 1249622 (2023) https://doi.org/10.1117/12.2660118
KEYWORDS: Shrinkage, Photoresist materials, Extreme ultraviolet lithography, Critical dimension metrology, Photoacid generators, Metrology, Extreme ultraviolet, Etching, Electron beams, Outgassing

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