Mr. Taihei Mori Profile

Taihei Mori

at TASMIT

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Publications (3)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper

High-performance denoiser based on deep learning trained by precisely reproduced SEM noise

Taihei Mori, Yosuke Okamoto, Masahiro Oya, Shinji Mizutani, Shinichi Nakazawa, Kotaro Maruyama, Yuichiro Yamazaki

Proceedings Volume 12053, 120531D (2022) https://doi.org/10.1117/12.2615750

KEYWORDS: Scanning electron microscopy, Anisotropy, Denoising, Inspection, Data modeling, Image denoising, Neural networks, Metrology, Image processing, Algorithm development

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Proceedings Article | 22 February 2021 Presentation + Paper

Improvement of EPE measurement accuracy on ADI wafer, the method of using machine learning trained with CAD

Yosuke Okamoto, Shinichi Nakazawa, Akinori Kawamura, Taihei Mori, Kotaro Maruyama, Seul-Ki Kang, Yuichiro Yamazaki

Proceedings Volume 11611, 116111W (2021) https://doi.org/10.1117/12.2584709

KEYWORDS: Machine learning, Semiconducting wafers, Computer aided design, Scanning electron microscopy, Metrology, Data modeling, Solid modeling, Image segmentation, Inspection, Feature extraction

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Proceedings Article | 20 March 2020 Paper

Contour extraction algorithm for edge placement error measurement using machine learning

Yosuke Okamoto, Shinichi Nakazawa, Akinori Kawamura, Tsugihiko Haga, Taihei Mori, Kotaro Maruyama, Seul-Ki Kang, Yuichiro Yamazaki

Proceedings Volume 11325, 113252A (2020) https://doi.org/10.1117/12.2553663

KEYWORDS: Scanning electron microscopy, Computer aided design, Machine learning, Edge detection, Precision measurement

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