PROCEEDINGS VOLUME 3892
ASIA PACIFIC SYMPOSIUM ON MICROELECTRONICS AND MEMS | 27-29 OCTOBER 1999
Device and Process Technologies for MEMS and Microelectronics
Editor(s): Kevin H. Chau, Sima Dimitrijev
Editor Affiliations +
IN THIS VOLUME

6 Sessions, 36 Papers, 0 Presentations, 0 Posters
ASIA PACIFIC SYMPOSIUM ON MICROELECTRONICS AND MEMS
27-29 October 1999
Gold Coast, Australia
Microactuators
Urban Simu, Stefan A. I. Johansson
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364476
Tobias Rosqvist, Stefan A. I. Johansson
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364485
Seiichi Hata, Kaiji Sato, Akira Shimokohbe
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364504
Che-Heung Kim, Yong-Kweon Kim
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364508
Thorbjoern Ebefors, Johan Ulfstedt-Mattsson, Edvard Kaelvesten, Goeran Stemme
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364509
Wenmei Lin, Andreas Schroth, Sohei Matsumoto, Cheng-Kuo Lee, Ryutaro Maeda
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364510
MEMS Technologies
Kevin J. Winchester, Sue M.R. Spaargaren, John M. Dell
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364511
Poster Session
Won-Ick Jang, Chang-Auck Choi, Yoonshik Hong, Chi-Hoon Jun, Youn Tae Kim, Jong-Hyun Lee
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364477
MEMS Technologies
MingCheng Cheng, Wei-Gei Ho, Chin Piao Chang, Wen Sheh Huang, Ruey-Shing Star Huang
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364478
Lena Klintberg, Greger Thornell, Stefan A. I. Johansson
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364479
Greger Thornell, Anders Jansson, Stefan A. I. Johansson
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364480
George D. Bachand, Carlo D. Montemagno
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364481
Sensors and Photodevices
Olaf Bartels, Alexandra Splinter, Uwe Storm, Josef Binder
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364482
Mary J. Li, Christine A. Allen, Shahid Aslam, Tina C. Chen, Fred M. Finkbeiner, Scott A. Gordon, Jonathan L. Kuhn, David Brent Mott, Carl Michael Stahle, et al.
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364483
Seo Kyu Kim, KukJin Chun
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364484
Wenmin Qu, Wojtek Wlodarski, Michael W. Austin
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364486
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364487
Hamid Gualous
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364488
Volkmar Norkus, Gerald Gerlach, Guenter Hofmann
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364489
Photolithography
David W. L. Tolfree, William O'Neill, Leslie Tunna, Christopher Sutcliffe
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364490
Dan V. Nicolau, Takahisa Taguchi, Susumu Yoshikawa
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364491
Dan V. Nicolau, Cristina Bercu, Simion Coca, Takahisa Taguchi
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364492
Erol C. Harvey, Tracy R. Mackin, Brian C. Dempster, Robert E. Scholten
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364493
Dan V. Nicolau, Susumu Yoshikawa, Mircea V. Dusa
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364494
D. F. Huang, Chih-Chien Hung
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364495
Hung-Chih Chen, Tse-Yu Lin, Yao-Chang Chu, Chih-Chien Hung
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364496
Other Process Issues
Phillipe Jamet, H. Barry Harrison, Sima Dimitrijev, Philip G. Tanner
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364497
Philip G. Tanner, Sima Dimitrijev, H. Barry Harrison
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364498
Juha Hagberg, Seppo Leppaevuori
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364499
Kaiji Sato, Seiichi Hata, Akira Shimokohbe
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364500
Poster Session
Guifu Ding, Aibin Yu, Xiaolin Zhao, Dong Xu, Bingchu Cai, Tianhui Shen
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364501
Gwiy-Sang Chung, Chin-Sung Park, Byeong-Kwon Ju
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364502
Yun-Kwon Park, Byeong-Kwon Ju, Heung-Woo Park, Young-Soo Yoon, Sang Seop Yom, Young-Jei Oh, Jung-Ho Park, Sang-Hee Suh, Myung-Hwan Oh, et al.
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364503
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364505
Jian-Yuan Chiou, M. F. Chen, C. L. Liu, Chih-Chien Hung
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364506
D. F. Huang, R. S. Yeh, Tse-Yu Lin, Chih-Chien Hung, T. C. Lin, Chao-Hsin Chang, Chia-Hsiang Chen
Proceedings Volume Device and Process Technologies for MEMS and Microelectronics, (1999) https://doi.org/10.1117/12.364507
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