Mr. Hee-Chang Ko Profile

Hee-Chang Ko

at Hanyang Univ

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Author

Publications (7)

Proceedings Article | 20 November 2024 Poster + Paper

Through pitch line width difference minimization by pixel source optimization

Min-Woo Kim, Da-Kyung Yu, Yu-Jin Chae, Hee-Chang Ko, Ji-Won Kang, Michael Yeung, Seung-Woo Son, Hye-Keun Oh

Proceedings Volume 13216, 132162L (2024) https://doi.org/10.1117/12.3037354

KEYWORDS: Optical proximity correction, Critical dimension metrology, Light sources and illumination, Semiconducting wafers, Mathematical optimization, Lithography, Extreme ultraviolet lithography, 3D mask effects, Source mask optimization

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Proceedings Article | 12 November 2024 Poster + Paper

Underlayer dependent local wafer deformation during EUV exposure

Hee-Chang Ko, Ji-Won Kang, Ji-Hyun Jeon, Seung-Woo Son, Hye-Keun Oh

Proceedings Volume 13215, 1321518 (2024) https://doi.org/10.1117/12.3029441

KEYWORDS: Thermal deformation, Semiconducting wafers, Extreme ultraviolet lithography, Simulations, Extreme ultraviolet, Photoresist materials, Thin films, Overlay metrology, Scanners, Silicon

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Proceedings Article | 21 November 2023 Poster + Paper

Thermal deformation variations with field positions on the wafer and resist types (CAR and MOR)

Hee-Chang Ko, Min-Woo Kim, Ji-Won Kang, Hye-Keun Oh

Proceedings Volume 12750, 1275016 (2023) https://doi.org/10.1117/12.2686285

KEYWORDS: Thermal deformation, Semiconducting wafers, Extreme ultraviolet lithography, Materials properties, Scanners, Optical lithography, Finite element methods, Extreme ultraviolet, Convection, Overlay metrology

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Proceedings Article | 28 April 2023 Presentation + Paper

Effect of particle defect to extreme ultra-violet pellicle

Ji-Hyun Jeon, Ji-Won Kang, Hee-Chang Ko, Won-Young Choi, Hye-Keun Oh

Proceedings Volume 12494, 124940G (2023) https://doi.org/10.1117/12.2657898

KEYWORDS: Pellicles, Particles, Extreme ultraviolet, Extreme ultraviolet lithography, Temperature metrology, Semiconducting wafers, Tin, Aluminum, Scanners, Materials properties, High volume manufacturing

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Proceedings Article | 1 December 2022 Poster + Paper

Estimation of mechanical stability of EUV pellicle by the collision of the particle defect

Ji-Won Kang, Won-Young Choi, Hee-Chang Ko, Jang-Gun Park, Min-Woo Kim, Jun-Hyeung Lee, Hye-Keun Oh

Proceedings Volume 12292, 122920S (2022) https://doi.org/10.1117/12.2643119

KEYWORDS: Pellicles, Particles, Extreme ultraviolet, Graphene, Silicon carbide, Transmittance, Extreme ultraviolet lithography, Photomasks, Image processing, Semiconducting wafers

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Proceedings Article | 31 October 2022 Poster

Possible underlayer dependent CD and overlay variation due to different heat absorption with EUV exposure

Wonyoung Choi, Heechang Ko, Jiwon Kang, Janggun Park, Minwoo Kim, Junhyeong Lee, Hyekeun Oh

Proceedings Volume PC12292, PC122920R (2022) https://doi.org/10.1117/12.2643047

KEYWORDS: Extreme ultraviolet lithography, Critical dimension metrology, Absorption, Thin films, Semiconducting wafers, Photoresist materials, Overlay metrology, Thin film manufacturing, Thin film deposition, Semiconductors

Proceedings Article | 26 May 2022 Poster + Paper

Optimal thickness of phase shift mask considering phase and reflectance in high NA EUV contact-hole pattern

Jang-Gun Park, Min-Woo Kim, Ji-Won Kang, Hee-Chang Ko, Jun-Hyung Lee, Won-Young Choi, Hye-Keun Oh

Proceedings Volume 12051, 120510O (2022) https://doi.org/10.1117/12.2613984

KEYWORDS: Reflectivity, Nanoimprint lithography, Photomasks, Extreme ultraviolet, Phase shifts, Stochastic processes, Critical dimension metrology, Optical lithography, Extreme ultraviolet lithography, 3D image processing

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Showing 5 of 7 publications

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