Dr. Tao Li
at IBM
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 22 February 2021 Presentation
Tao Li, Stefan Schmitz, Phil Friddle, Samantha Tan, Wenbing Yang, Indira Seshadri
Proceedings Volume 11615, 116150E (2021) https://doi.org/10.1117/12.2583647
KEYWORDS: Etching, Silicon, Ions, Chemistry, Control systems, Plasma, Optical lithography, Modulation, Manufacturing, Chlorine

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11609, 116090S (2021) https://doi.org/10.1117/12.2583897

Proceedings Article | 25 March 2020 Presentation
Proceedings Volume 11328, 113280B (2020) https://doi.org/10.1117/12.2552159

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