Dr. Uwe Paul Schroeder
Manager at Apple
SPIE Involvement:
Author
Publications (36)

Proceedings Article | 22 April 2024 Poster + Paper
Proceedings Volume 12957, 129571M (2024) https://doi.org/10.1117/12.3009845
KEYWORDS: Calibration, Optical proximity correction, Extreme ultraviolet, Data modeling, Education and training, Performance modeling, Advanced patterning, Metrology, Machine learning, Databases

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12495, 124951G (2023) https://doi.org/10.1117/12.2658646
KEYWORDS: Data modeling, Machine learning, Neural networks, Design and modelling, Design for manufacturing, Principal component analysis, Correlation coefficients, Singular value decomposition, Mathematical optimization, Lithography

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12495, 124950V (2023) https://doi.org/10.1117/12.2659397
KEYWORDS: Design and modelling, Design for manufacturing, Design rules, Manufacturing, Library classification systems, Image classification, Design for manufacturability, Yield improvement, Target detection, Profiling

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12495, 1249519 (2023) https://doi.org/10.1117/12.2657156
KEYWORDS: Design and modelling, Design for manufacturing, Design rules, Machine learning, Data modeling, Statistical modeling, Statistical analysis, Chip manufacturing

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12052, 120520O (2022) https://doi.org/10.1117/12.2617261
KEYWORDS: Data modeling, Machine learning, Silicon, Feature extraction, Optical proximity correction, Metals, Fuzzy logic, Profiling, Databases, Data processing

Showing 5 of 36 publications
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